Issued Patents All Time
Showing 1–25 of 105 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394655 | Subsurface alignment metrology system for packaging applications | Venkatakaushik Voleti, Keith Wells | 2025-08-19 |
| 12288350 | Image based metrology of surface deformations | Guoheng Zhao | 2025-04-29 |
| 12276490 | System and method to map thickness variations of substrates in manufacturing systems | Todd Egan, Gopalakrishna B. Prabhu | 2025-04-15 |
| 12222659 | Metrology system for packaging applications | Venkatakaushik Voleti | 2025-02-11 |
| 12211717 | Spatial pattern loading measurement with imaging metrology | Eric Ng, Edward W. Budiarto, Todd Egan, Venkatakaushik Voleti | 2025-01-28 |
| 12098914 | Surface roughness and emissivity determination | Eric Ng, Todd Egan | 2024-09-24 |
| 12002665 | Real-time detection of particulate matter during deposition chamber manufacturing | Todd Egan, Kyle Tantiwong | 2024-06-04 |
| 11908716 | Image-based in-situ process monitoring | Guoheng Zhao, Venkatakaushik Voleti, Todd Egan, Kyle Tantiwong, Andreas Schulze +1 more | 2024-02-20 |
| 11441992 | Method and apparatus for detection of particle size in a fluid | Todd Egan, Guoheng Zhao | 2022-09-13 |
| 11442000 | In-situ, real-time detection of particulate defects in a fluid | Sankesha Bhoyar, Rachit Sharma, Guoheng Zhao | 2022-09-13 |
| 11417010 | Image based metrology of surface deformations | Guoheng Zhao | 2022-08-16 |
| 11353389 | Method and apparatus for detection of particle size in a fluid | Avishek Ghosh | 2022-06-07 |
| 11309163 | Multibeamlet charged particle device and method | Christopher Dennis Bencher, Krishna Sreerambhatla, Hussein Fawaz, Lior ENGEL, Robert Perlmutter | 2022-04-19 |
| 11204330 | Systems and methods for inspection of a specimen | Eliezer Rosengaus | 2021-12-21 |
| 11187654 | Imaging reflectometer | Guoheng Zhao, Todd Egan | 2021-11-30 |
| 11156566 | High sensitivity image-based reflectometry | Guoheng Zhao | 2021-10-26 |
| 11150078 | High sensitivity image-based reflectometry | Guoheng Zhao | 2021-10-19 |
| 11119051 | Particle detection for substrate processing | Todd Egan, Samer Banna, Kyle Tantiwong, Gregory L. Kirk, Abraham Ravid +1 more | 2021-09-14 |
| 10923371 | Metrology system for substrate deformation measurement | Todd Egan, Samer Banna, Kyle Tantiwong | 2021-02-16 |
| 10845317 | Particle detection for substrate processing | Todd Egan, Samer Banna, Kyle Tantiwong, Gregory L. Kirk, Abraham Ravid +1 more | 2020-11-24 |
| 10816464 | Imaging reflectometer | Guoheng Zhao, Todd Egan | 2020-10-27 |
| 10705431 | Quarter wave light splitting | Christopher Dennis Bencher, Joseph R. Johnson, David A. Markle | 2020-07-07 |
| 10599044 | Digital lithography with extended field size | Guoheng Zhao, Jeremy Nesbitt, Christopher Dennis Bencher | 2020-03-24 |
| 10527407 | In-situ metrology method for thickness measurement during PECVD processes | Khokan Chandra Paul, Edward W. Budiarto, Todd Egan, Jeongmin Lee, Dale R. Du Bois +1 more | 2020-01-07 |
| 10522375 | Monitoring system for deposition and method of operation thereof | Edward W. Budiarto, Majeed A. Foad, Ralf Hofmann, Thomas Nowak, Todd Egan | 2019-12-31 |