Issued Patents All Time
Showing 26–50 of 105 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510624 | Metrology systems with multiple derivative modules for substrate stress and deformation measurement | Todd Egan, Samer Banna, Kyle Tantiwong | 2019-12-17 |
| 10488348 | Wafer inspection | Anatoly Romanovsky, Ivan Maleev, Daniel Kavaldjiev, Yury Yuditsky, Dirk Woll +2 more | 2019-11-26 |
| 10474041 | Digital lithography with extended depth of focus | Guoheng Zhao, Jeremy Nesbitt, Christopher Dennis Bencher | 2019-11-12 |
| 10422984 | Flexible mode scanning optical microscopy and inspection system | Samer Banna, Waheb Bishara, Dong Wu | 2019-09-24 |
| 10394130 | Quarter wave light splitting | Christopher Dennis Bencher, Joseph R. Johnson, Dave Markle | 2019-08-27 |
| 10281261 | In-situ metrology method for thickness measurement during PECVD processes | Khokan Chandra Paul, Edward W. Budiarto, Todd Egan, Jeongmin Lee, Dale R. Du Bois +1 more | 2019-05-07 |
| 9989477 | Simultaneous multi-spot inspection and imaging | Lawrence R. Miller | 2018-06-05 |
| 9978620 | Method and apparatus for reducing radiation induced change in semiconductor structures | Gary E. Dickerson, Seng (victor) Keong Lim, Samer Banna, Gregory L. Kirk | 2018-05-22 |
| 9915622 | Wafer inspection | Anatoly Romanovsky, Ivan Maleev, Daniel Kavaldjiev, Yury Yuditsky, Dirk Woll +2 more | 2018-03-13 |
| 9870935 | Monitoring system for deposition and method of operation thereof | Edward W. Budiarto, Majeed A. Foad, Ralf Hofmann, Thomas Nowak, Todd Egan | 2018-01-16 |
| 9679372 | Apparatus and methods for inspecting extreme ultra violet reticles | Mehran Nasser-Ghodsi, Stanley Stokowski | 2017-06-13 |
| 9646893 | Method and apparatus for reducing radiation induced change in semiconductor structures | Gary E. Dickerson, Seng (victor) Keong Lim, Samer Banna, Gregory L. Kirk | 2017-05-09 |
| 9568435 | Simultaneous multi-spot inspection and imaging | Lawrence R. Miller | 2017-02-14 |
| 9404873 | Wafer inspection with multi-spot illumination and multiple channels | Stephen Biellak | 2016-08-02 |
| 9291575 | Wafer inspection | Guoheng Zhao, Jenn-Kuen Leong | 2016-03-22 |
| 9279774 | Wafer inspection | Anatoly Romanovsky, Ivan Maleev, Daniel Kavaldjiev, Yury Yuditsky, Dirk Woll +2 more | 2016-03-08 |
| 9182358 | Multi-spot defect inspection system | Zhiwei Xu, Christian Wolters, Juergen Reich, Bret Whiteside, Guoheng Zhao +3 more | 2015-11-10 |
| 9176072 | Dark field inspection system with ring illumination | Guoheng Zhao, Scott A. Young, Kris Bhaskar | 2015-11-03 |
| 9086389 | Sample inspection system detector | Daniel Kavaldjiev, Stephen Biellak, Guoheng Zhao | 2015-07-21 |
| 9068917 | Systems and methods for inspection of a specimen | Eliezer Rosengaus | 2015-06-30 |
| 9052190 | Bright-field differential interference contrast system with scanning beams of round and elliptical cross-sections | Ali Salehpour, Jaydeep Sinha, Kurt L. Haller, Pradeep Vukkadala, George Kren +1 more | 2015-06-09 |
| 8953869 | Apparatus and methods for inspecting extreme ultra violet reticles | Mehran Nasser-Ghodsi, Stanley Stokowski | 2015-02-10 |
| 8891079 | Wafer inspection | Guoheng Zhao, Jenn-Kuen Leong | 2014-11-18 |
| 8817250 | Air bearing for substrate inspection device | Paul Doyle, Guoheng Zhao, Alexander Belyaev, J. Rex Runyon, Christian Wolters +1 more | 2014-08-26 |
| 8817248 | Simultaneous multi-spot inspection and imaging | Lawrence R. Miller | 2014-08-26 |