| 11644756 |
3D structure inspection or metrology using deep learning |
Kris Bhaskar, Lena Nicolaides |
2023-05-09 |
| 11580375 |
Accelerated training of a machine learning based model for semiconductor applications |
Kris Bhaskar, Laurent Karsenti, Mohan Mahadevan, Jing Zhang, Brian Duffy +4 more |
2023-02-14 |
| 10861671 |
Method and system for focus adjustment of a multi-beam scanning electron microscopy system |
Doug K. Masnaghetti, Richard R. Simmons, Mark A. McCord, Rainer Knippelmeyer |
2020-12-08 |
| 10733744 |
Learning based approach for aligning images acquired with different modalities |
Thanh Huy Ha, Mohan Mahadevan |
2020-08-04 |
| 10533954 |
Apparatus and methods for combined brightfield, darkfield, and photothermal inspection |
Lena Nicolaides, Mohan Mahadevan, Alex Salnik |
2020-01-14 |
| 10402688 |
Data augmentation for convolutional neural network-based defect inspection |
Bjorn Brauer, Vijay Ramachandran, Richard Wallingford |
2019-09-03 |
| 10360477 |
Accelerating semiconductor-related computations using learning based models |
Kris Bhaskar, Mark J. Roulo, Jing Zhang, Laurent Karsenti, Mohan Mahadevan +1 more |
2019-07-23 |
| 10325753 |
Method and system for focus adjustment of a multi-beam scanning electron microscopy system |
Doug K. Masnaghetti, Richard R. Simmons, Mark A. McCord, Rainer Knippelmeyer |
2019-06-18 |
| 9961326 |
Stereo extended depth of focus |
Andy Hill |
2018-05-01 |
| 9916965 |
Hybrid inspectors |
Kris Bhaskar, Grace Hsiu-Ling Chen, Keith Wells, Wayne McMillan, Jing Zhang +1 more |
2018-03-13 |
| 9772297 |
Apparatus and methods for combined brightfield, darkfield, and photothermal inspection |
Lena Nicolaides, Mohan Mahadevan, Alex Salnik |
2017-09-26 |
| 9553034 |
Combined semiconductor metrology system |
Guoheng Zhao, Nanchang Zhu, Neeraj Khanna |
2017-01-24 |
| 9176072 |
Dark field inspection system with ring illumination |
Guoheng Zhao, Mehdi Vaez-Iravani, Kris Bhaskar |
2015-11-03 |
| 9165742 |
Inspection site preparation |
Richard R. Simmons, Douglas K. Masnaghetti, Mark A. McCord, Fred E. Stanke, Christopher Sears |
2015-10-20 |
| 9041930 |
Digital pathology system |
Eliezer Rosengaus, Ashok Kulkarni |
2015-05-26 |
| 8643835 |
Active planar autofocus |
Daniel L. Cavan, Yale Zhang, Aviv Balan |
2014-02-04 |
| 8604447 |
Solar metrology methods and apparatus |
Guoheng Zhao, Ady Levy, Marco Guevremont, Neeraj Khanna |
2013-12-10 |
| 8600143 |
Method and system for hierarchical tissue analysis and classification |
Ashok Kulkarni, Eliezer Rosengaus |
2013-12-03 |
| 7858911 |
Confocal wafer inspection system and method |
Christopher R. Fairley, Tao-Yi Fu, Bin-Ming Benjamin Tsai |
2010-12-28 |
| 7399950 |
Confocal wafer inspection method and apparatus using fly lens arrangement |
Christopher R. Fairley, Tao-Yi Fu, Bin-Ming Benjamin Tsai |
2008-07-15 |
| 7109458 |
Confocal wafer depth scanning inspection method |
Christopher R. Fairley, Tao-Yi Fu, Bin-Ming Benjamin Tsai |
2006-09-19 |
| 6867406 |
Confocal wafer inspection method and apparatus using fly lens arrangement |
Christopher R. Fairley, Tao-Yi Fu, Bin-Ming Benjamin Tsai |
2005-03-15 |
| 6141038 |
Alignment correction prior to image sampling in inspection systems |
Roger Kroeze, Curt H. Chadwick, Nicholas Szabo, Kent Douglas, Fred Babian |
2000-10-31 |
| 4805123 |
Automatic photomask and reticle inspection method and apparatus including improved defect detector and alignment sub-systems |
Donald F. Specht, Tim S. Wihl, James J. Hager, Jr., Matthew B. Lutzker |
1989-02-14 |