NZ

Nanchang Zhu

KL Kla-Tencor: 11 patents #127 of 1,394Top 10%
KL Kla: 1 patents #347 of 758Top 50%
Overall (All Time): #405,766 of 4,157,543Top 10%
12
Patents All Time

Issued Patents All Time

Showing 1–12 of 12 patents

Patent #TitleCo-InventorsDate
11543431 Cantilever-type probe with multiple metallic coatings Hongshuo Zou, Hai-Yang You 2023-01-03
11249110 Resistivity probes with curved portions Walter H. Johnson, Xianghua Liu, Jianli Cui, Zhu Shi, Zhuoxian Zhang +4 more 2022-02-15
10663279 Dynamic determination of metal film thickness from sheet resistance and TCR value Xianghua Liu, Walter H. Johnson, Jianli Cui, Lu Yu, Juli Cheng +2 more 2020-05-26
10598477 Dynamic determination of metal film thickness from sheet resistance and TCR value Xianghua Liu, Walter H. Johnson, Jianli Cui, Lu Yu, Juli Cheng +2 more 2020-03-24
10514391 Resistivity probe having movable needle bodies Walter H. Johnson, Xianghua Liu, Jianli Cui, Zhu Shi, Zhuoxian Zhang +4 more 2019-12-24
10302677 Multiple pin probes with support for performing parallel measurements Zhubin Shi 2019-05-28
9553034 Combined semiconductor metrology system Scott A. Young, Guoheng Zhao, Neeraj Khanna 2017-01-24
9435826 Variable spacing four-point probe pin device and method Walter H. Johnson, Jianou Shi, Lansheng Dong, Haijing Peng, Xianghua Liu +2 more 2016-09-06
9030219 Variable pressure four-point coated probe pin device and method Walter H. Johnson 2015-05-12
8804106 System and method for nondestructively measuring concentration and thickness of doped semiconductor layers Derrick Shaughnessy, Houssam Chouaib, Yaolei Zheng, Lu Yu, Jianli Cui +2 more 2014-08-12
8004290 Method and apparatus for determining dielectric layer properties Xiafang Zhang, Yiping Feng, Min Xiang, Jianou Shi 2011-08-23
7724003 Substrate conditioning for corona charge control Jainou Shi, Min Xiang, ZiangHua Liu, Goujun Zhang, Xiafang Zhang +3 more 2010-05-25