Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12379672 | Metrology of nanosheet surface roughness and profile | HaoMiao Chang, Teng Gu, Tianrong Zhan, Andrew Lagodzinski, Zhengquan Tan | 2025-08-05 |
| 12380367 | Metrology in the presence of CMOS under array (CuA) structures utilizing machine learning and physical modeling | Zhaxylyk Kudyshev, Chao Chang, Derrick Shaughnessy | 2025-08-05 |
| 12372882 | Metrology in the presence of CMOS under array (CUA) structures utilizing an effective medium model with classification of CUA structures | Zhaxylyk Kudyshev, Chao Chang, Derrick Shaughnessy | 2025-07-29 |
| 11796390 | Bandgap measurements of patterned film stacks using spectroscopic metrology | Tianhan Wang, Aaron Rosenberg, Dawei Hu, Alexander Kuznetsov, Manh Dang Nguyen +8 more | 2023-10-24 |
| 11573077 | Scatterometry based methods and systems for measurement of strain in semiconductor structures | Aaron Rosenberg, Kai-Hsiang Lin, Dawei Hu, Zhengquan Tan | 2023-02-07 |
| 11555689 | Measuring thin films on grating and bandgap on grating | Zhengquan Tan | 2023-01-17 |
| 11378451 | Bandgap measurements of patterned film stacks using spectroscopic metrology | Tianhan Wang, Aaron Rosenberg, Dawei Hu, Alexander Kuznetsov, Manh Dang Nguyen +8 more | 2022-07-05 |
| 11156548 | Measurement methodology of advanced nanostructures | Manh Dang Nguyen, Phillip Atkins, Alexander Kuznetsov, Liequan Lee, Natalia Malkova +3 more | 2021-10-26 |
| 11099137 | Visualization of three-dimensional semiconductor structures | Aaron Rosenberg, Jonathan Iloreta, Thaddeus Gerard Dziura, Antonio Arion Gellineau, Yin Xu +5 more | 2021-08-24 |
| 11060846 | Scatterometry based methods and systems for measurement of strain in semiconductor structures | Aaron Rosenberg, Kai-Hsiang Lin, Dawei Hu, Zhengquan Tan | 2021-07-13 |
| 11036898 | Measurement models of nanowire semiconductor structures based on re-useable sub-structures | Alexander Kuznetsov | 2021-06-15 |
| 10794839 | Visualization of three-dimensional semiconductor structures | Aaron Rosenberg, Jonathan Iloreta, Thaddeus Gerard Dziura, Antonio Arion Gellineau, Yin Xu +5 more | 2020-10-06 |
| 10663286 | Measuring thin films on grating and bandgap on grating | Zhengquan Tan | 2020-05-26 |
| 10458912 | Model based optical measurements of semiconductor structures with anisotropic dielectric permittivity | Qiang Zhao, Andrei V. Shchegrov, Zhengquan Tan | 2019-10-29 |
| 8804106 | System and method for nondestructively measuring concentration and thickness of doped semiconductor layers | Nanchang Zhu, Derrick Shaughnessy, Yaolei Zheng, Lu Yu, Jianli Cui +2 more | 2014-08-12 |
| 7659979 | Optical inspection apparatus and method | Martin Edward Murtagh, Patrick Vincent Kelly, Vincent Guenebaut | 2010-02-09 |