Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12379672 | Metrology of nanosheet surface roughness and profile | Houssam Chouaib, HaoMiao Chang, Teng Gu, Tianrong Zhan, Andrew Lagodzinski | 2025-08-05 |
| 11796390 | Bandgap measurements of patterned film stacks using spectroscopic metrology | Tianhan Wang, Aaron Rosenberg, Dawei Hu, Alexander Kuznetsov, Manh Dang Nguyen +8 more | 2023-10-24 |
| 11573077 | Scatterometry based methods and systems for measurement of strain in semiconductor structures | Houssam Chouaib, Aaron Rosenberg, Kai-Hsiang Lin, Dawei Hu | 2023-02-07 |
| 11555689 | Measuring thin films on grating and bandgap on grating | Houssam Chouaib | 2023-01-17 |
| 11378451 | Bandgap measurements of patterned film stacks using spectroscopic metrology | Tianhan Wang, Aaron Rosenberg, Dawei Hu, Alexander Kuznetsov, Manh Dang Nguyen +8 more | 2022-07-05 |
| 11060846 | Scatterometry based methods and systems for measurement of strain in semiconductor structures | Houssam Chouaib, Aaron Rosenberg, Kai-Hsiang Lin, Dawei Hu | 2021-07-13 |
| 10663286 | Measuring thin films on grating and bandgap on grating | Houssam Chouaib | 2020-05-26 |
| 10458912 | Model based optical measurements of semiconductor structures with anisotropic dielectric permittivity | Houssam Chouaib, Qiang Zhao, Andrei V. Shchegrov | 2019-10-29 |
| 10013518 | Model building and analysis engine for combined X-ray and optical metrology | Michael S. Bakeman, Andrei V. Shchegrov, Qiang Zhao | 2018-07-03 |
| 7349079 | Methods for measurement or analysis of a nitrogen concentration of a specimen | Qiang Zhao, Torsten R. Kaack, Sungchul Yoo | 2008-03-25 |
| 7196021 | HDP-CVD deposition process for filling high aspect ratio gaps | Dongqing Li, Walter Zygmunt | 2007-03-27 |
| 7159597 | Multistep remote plasma clean process | Zhong Qiang Hua, Zhuang Li, Kent Rossman | 2007-01-09 |
| 7064077 | Method for high aspect ratio HDP CVD gapfill | Zhong Qiang Hua, Dong Li, Zhuang Li, Michael Kwan, Bruno Geoffrion +1 more | 2006-06-20 |
| 6929700 | Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD | Dongqing Li, Walter Zygmunt, Tetsuya Ishikawa | 2005-08-16 |
| 6914016 | HDP-CVD deposition process for filling high aspect ratio gaps | Dongqing Li, Walter Zygmunt | 2005-07-05 |
| 6812153 | Method for high aspect ratio HDP CVD gapfill | Zhong Qiang Hua, Dong Li, Zhuang Li, Michael Kwan, Bruno Geoffrion +1 more | 2004-11-02 |
| 6740601 | HDP-CVD deposition process for filling high aspect ratio gaps | Dongqing Li, Walter Zygmunt | 2004-05-25 |
| 6715496 | Method and apparatus for cleaning a semiconductor wafer processing system | Michael Kwan, Alan W. Collins, Jalel Hamila, Padmanabhan Krishnaraj | 2004-04-06 |
| 6682603 | Substrate support with extended radio frequency electrode upper surface | Sudhir Gondhalekar, Dongqing Li, Canfeng Lai, Steve Kim, Alexander Veyster | 2004-01-27 |
| 6596123 | Method and apparatus for cleaning a semiconductor wafer processing system | Michael Kwan, Alan W. Collins, Jalel Hamila, Padmanabhan Krishnaraj | 2003-07-22 |
| 6596653 | Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD | Dongqing Li, Walter Zygmunt, Tetsuya Ishikawa | 2003-07-22 |
| 6423384 | HDP-CVD deposition of low dielectric constant amorphous carbon film | Kasra Khazeni, Eugene Tzou | 2002-07-23 |