Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11733035 | Feed-forward of multi-layer and multi-process information using XPS and XRF technologies | Heath A. Pois, Wei Ti Lee, Lawrence V. Bot, Mark Klare, Charles Thomas Larson | 2023-08-22 |
| 11029148 | Feed-forward of multi-layer and multi-process information using XPS and XRF technologies | Heath A. Pois, Wei Ti Lee, Lawrence V. Bot, Mark Klare, Charles Thomas Larson | 2021-06-08 |
| 10648802 | Feed-forward of multi-layer and multi-process information using XPS and XRF technologies | Heath A. Pois, Wei Ti Lee, Lawrence V. Bot, Mark Klare, Charles Thomas Larson | 2020-05-12 |
| 10082390 | Feed-forward of multi-layer and multi-process information using XPS and XRF technologies | Heath A. Pois, Wei Ti Lee, Lawrence V. Bot, Mark Klare, Charles Thomas Larson | 2018-09-25 |
| 7638440 | Method of depositing an amorphous carbon film for etch hardmask application | Yuxiang Wang, Sudha Rathi, Hichem M'Saad | 2009-12-29 |
| 7407893 | Liquid precursors for the CVD deposition of amorphous carbon films | Martin Jay Seamons, Wendy H. Yeh, Sudha Rathi, Deenesh Padhi, Andy Luan +6 more | 2008-08-05 |
| 7253123 | Method for producing gate stack sidewall spacers | Reza Arghavani, Li-Qun Xia, Kang Sub Yim | 2007-08-07 |
| 7064077 | Method for high aspect ratio HDP CVD gapfill | Zhong Qiang Hua, Dong Li, Zhengquan Tan, Zhuang Li, Bruno Geoffrion +1 more | 2006-06-20 |
| 7052552 | Gas chemistry cycling to achieve high aspect ratio gapfill with HDP-CVD | Eric Liu | 2006-05-30 |
| 6812153 | Method for high aspect ratio HDP CVD gapfill | Zhong Qiang Hua, Dong Li, Zhengquan Tan, Zhuang Li, Bruno Geoffrion +1 more | 2004-11-02 |
| 6715496 | Method and apparatus for cleaning a semiconductor wafer processing system | Alan W. Collins, Jalel Hamila, Padmanabhan Krishnaraj, Zhengquan Tan | 2004-04-06 |
| 6596123 | Method and apparatus for cleaning a semiconductor wafer processing system | Alan W. Collins, Jalel Hamila, Padmanabhan Krishnaraj, Zhengquan Tan | 2003-07-22 |
| 6335288 | Gas chemistry cycling to achieve high aspect ratio gapfill with HDP-CVD | Eric Liu | 2002-01-01 |
| 6045877 | Pyrolytic chemical vapor deposition of silicone films | Karen K. Gleason | 2000-04-04 |