Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12158437 | XPS metrology for process control in selective deposition | Kavita Shah, Wei Ti Lee | 2024-12-03 |
| 11733035 | Feed-forward of multi-layer and multi-process information using XPS and XRF technologies | Heath A. Pois, Wei Ti Lee, Lawrence V. Bot, Michael Kwan, Mark Klare | 2023-08-22 |
| 11680915 | XPS metrology for process control in selective deposition | Kavita Shah, Wei Ti Lee | 2023-06-20 |
| 11346795 | XPS metrology for process control in selective deposition | Kavita Shah, Wei Ti Lee | 2022-05-31 |
| 11029148 | Feed-forward of multi-layer and multi-process information using XPS and XRF technologies | Heath A. Pois, Wei Ti Lee, Lawrence V. Bot, Michael Kwan, Mark Klare | 2021-06-08 |
| 10801978 | XPS metrology for process control in selective deposition | Kavita Shah, Wei Ti Lee | 2020-10-13 |
| 10648802 | Feed-forward of multi-layer and multi-process information using XPS and XRF technologies | Heath A. Pois, Wei Ti Lee, Lawrence V. Bot, Michael Kwan, Mark Klare | 2020-05-12 |
| 10082390 | Feed-forward of multi-layer and multi-process information using XPS and XRF technologies | Heath A. Pois, Wei Ti Lee, Lawrence V. Bot, Michael Kwan, Mark Klare | 2018-09-25 |