| 12281893 |
Characterizing and measuring in small boxes using XPS with multiple measurements |
Heath A. Pois, Laxmi WARAD, Dmitry Kislitsyn, Parker Lund, Benny Tseng +2 more |
2025-04-22 |
|
| 12158437 |
XPS metrology for process control in selective deposition |
Charles Thomas Larson, Kavita Shah |
2024-12-03 |
$57,184,000 |
| 12066391 |
Method and system for non-destructive metrology of thin layers |
Heath A. Pois, Mark Klare, Cornel Bozdog |
2024-08-20 |
$59,912,000 |
| 11997932 |
Resistive switching memory having confined filament formation and methods thereof |
Sundar Narayanan, Wee Chen Gan, Natividad Vasquez |
2024-05-28 |
|
| 11988502 |
Characterizing and measuring in small boxes using XPS with multiple measurements |
Heath A. Pois, Laxmi WARAD, Dmitry Kislitsyn, Parker Lund, Benny Tseng +2 more |
2024-05-21 |
$46,022,000 |
| 11906451 |
Method and system for non-destructive metrology of thin layers |
Heath A. Pois, Mark Klare, Cornel Bozdog, Alok Vaid |
2024-02-20 |
|
| 11733035 |
Feed-forward of multi-layer and multi-process information using XPS and XRF technologies |
Heath A. Pois, Lawrence V. Bot, Michael Kwan, Mark Klare, Charles Thomas Larson |
2023-08-22 |
$21,818,000 |
| 11680915 |
XPS metrology for process control in selective deposition |
Charles Thomas Larson, Kavita Shah |
2023-06-20 |
$22,141,000 |
| 11668663 |
Method and system for non-destructive metrology of thin layers |
Heath A. Pois, Mark Klare, Cornel Bozdog |
2023-06-06 |
$22,360,000 |
| 11346795 |
XPS metrology for process control in selective deposition |
Charles Thomas Larson, Kavita Shah |
2022-05-31 |
$26,723,000 |
| 11295969 |
Hybridization for characterization and metrology |
Gangadhara Raja Muthinti, Matthew Sendelbach, Roy Koret, Aron Cepler |
2022-04-05 |
$5,706,000 |
| 11029148 |
Feed-forward of multi-layer and multi-process information using XPS and XRF technologies |
Heath A. Pois, Lawrence V. Bot, Michael Kwan, Mark Klare, Charles Thomas Larson |
2021-06-08 |
$10,107,000 |
| 10801978 |
XPS metrology for process control in selective deposition |
Charles Thomas Larson, Kavita Shah |
2020-10-13 |
$11,967,000 |
| 10648802 |
Feed-forward of multi-layer and multi-process information using XPS and XRF technologies |
Heath A. Pois, Lawrence V. Bot, Michael Kwan, Mark Klare, Charles Thomas Larson |
2020-05-12 |
$8,932,000 |
| 10533961 |
Method and system for non-destructive metrology of thin layers |
Heath A. Pois, Mark Klare, Cornel Bozdog |
2020-01-14 |
$3,001,000 |
| 10082390 |
Feed-forward of multi-layer and multi-process information using XPS and XRF technologies |
Heath A. Pois, Lawrence V. Bot, Michael Kwan, Mark Klare, Charles Thomas Larson |
2018-09-25 |
$6,411,000 |
| 9952166 |
Silicon germanium thickness and composition determination using combined XPS and XRF technologies |
Heath A. Pois |
2018-04-24 |
$8,263,000 |
| 9926639 |
Methods for forming barrier/seed layers for copper interconnect structures |
Hoon Kim, Sang Ho Yu, Seshadri Ganguli, Hyoung-Chan Ha, Sang-Hyeob Lee |
2018-03-27 |
$21,583,000 |
| 9818939 |
Resistive switching devices having a switching layer and an intermediate electrode layer and methods of formation thereof |
John Ross Jameson, John Sanchez, Yi Ma, Venkatesh P. Gopinath, Foroozan Sarah Koushan |
2017-11-14 |
$3,343,000 |
| 9594035 |
Silicon germanium thickness and composition determination using combined XPS and XRF technologies |
Heath A. Pois |
2017-03-14 |
|
| 9593417 |
Gas line weldment design and process for CVD aluminum |
Ted Guo, Steve H. Chiao, Alan A. Ritchie |
2017-03-14 |
$16,778,000 |
| 9252359 |
Resistive switching devices having a switching layer and an intermediate electrode layer and methods of formation thereof |
John Ross Jameson, John Sanchez, Foroozan Sarah Koushan |
2016-02-02 |
$1,319,000 |
| 9129945 |
Formation of liner and barrier for tungsten as gate electrode and as contact plug to reduce resistance and enhance device performance |
Sang-Hyeob Lee, Sang Ho Yu, Seshadri Ganguli, Hyoung-Chan Ha, Hoon Kim |
2015-09-08 |
$6,271,000 |
| 9099633 |
Solid electrolyte memory elements with electrode interface for improved performance |
Chakravarthy Gopalan, Yi Ma, Jeffrey A. Shields |
2015-08-04 |
|
| 8895953 |
Programmable memory elements, devices and methods having physically localized structure |
Jeffrey A. Shields, John Ross Jameson |
2014-11-25 |
|
