Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12360063 | System and method for measuring a sample by x-ray reflectance scatterometry | David A. Reed, Bruno W. Schueler, Rodney Smedt, Jeffrey T. Fanton | 2025-07-15 |
| 12281893 | Characterizing and measuring in small boxes using XPS with multiple measurements | Wei Ti Lee, Laxmi WARAD, Dmitry Kislitsyn, Parker Lund, Benny Tseng +2 more | 2025-04-22 |
| 12066391 | Method and system for non-destructive metrology of thin layers | Wei Ti Lee, Mark Klare, Cornel Bozdog | 2024-08-20 |
| 11988502 | Characterizing and measuring in small boxes using XPS with multiple measurements | Wei Ti Lee, Laxmi WARAD, Dmitry Kislitsyn, Parker Lund, Benny Tseng +2 more | 2024-05-21 |
| 11906451 | Method and system for non-destructive metrology of thin layers | Wei Ti Lee, Mark Klare, Cornel Bozdog, Alok Vaid | 2024-02-20 |
| 11874237 | System and method for measuring a sample by x-ray reflectance scatterometry | David A. Reed, Bruno Shueler, Rodney Smedt, Jeffrey T. Fanton | 2024-01-16 |
| 11852467 | Method and system for monitoring deposition process | Laxmi WARAD, Srinivasan Rangarajan | 2023-12-26 |
| 11733035 | Feed-forward of multi-layer and multi-process information using XPS and XRF technologies | Wei Ti Lee, Lawrence V. Bot, Michael Kwan, Mark Klare, Charles Thomas Larson | 2023-08-22 |
| 11668663 | Method and system for non-destructive metrology of thin layers | Wei Ti Lee, Mark Klare, Cornel Bozdog | 2023-06-06 |
| 11029148 | Feed-forward of multi-layer and multi-process information using XPS and XRF technologies | Wei Ti Lee, Lawrence V. Bot, Michael Kwan, Mark Klare, Charles Thomas Larson | 2021-06-08 |
| 10859519 | Methods and systems for measuring periodic structures using multi-angle x-ray reflectance scatterometry (XRS) | David A. Reed, Bruno W. Schueler, Rodney Smedt, Jeffrey T. Fanton | 2020-12-08 |
| 10648802 | Feed-forward of multi-layer and multi-process information using XPS and XRF technologies | Wei Ti Lee, Lawrence V. Bot, Michael Kwan, Mark Klare, Charles Thomas Larson | 2020-05-12 |
| 10533961 | Method and system for non-destructive metrology of thin layers | Wei Ti Lee, Mark Klare, Cornel Bozdog | 2020-01-14 |
| 10481112 | Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) | David A. Reed, Bruno W. Schueler, Rodney Smedt, Jeffrey T. Fanton | 2019-11-19 |
| 10119925 | Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) | David A. Reed, Bruno W. Schueler, Rodney Smedt, Jeffrey T. Fanton | 2018-11-06 |
| 10082390 | Feed-forward of multi-layer and multi-process information using XPS and XRF technologies | Wei Ti Lee, Lawrence V. Bot, Michael Kwan, Mark Klare, Charles Thomas Larson | 2018-09-25 |
| 9952166 | Silicon germanium thickness and composition determination using combined XPS and XRF technologies | Wei Ti Lee | 2018-04-24 |
| 9594035 | Silicon germanium thickness and composition determination using combined XPS and XRF technologies | Wei Ti Lee | 2017-03-14 |
| 9588066 | Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) | David A. Reed, Bruno W. Schueler, Rodney Smedt, Jeffrey T. Fanton | 2017-03-07 |
| 8049903 | High resolution monitoring of CD variations | Jon Opsal, Ilya Grodnensky | 2011-11-01 |
| 7933026 | High resolution monitoring of CD variations | Jon Opsal, Ilya Grodnensky | 2011-04-26 |
| 7567351 | High resolution monitoring of CD variations | Jon Opsal, Ilya Grodnensky | 2009-07-28 |
| 7478019 | Multiple tool and structure analysis | Shahin Zangooie, Youxian Wen, Jon Opsal | 2009-01-13 |