Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12360063 | System and method for measuring a sample by x-ray reflectance scatterometry | Heath A. Pois, David A. Reed, Bruno W. Schueler, Rodney Smedt | 2025-07-15 |
| 11874237 | System and method for measuring a sample by x-ray reflectance scatterometry | Heath A. Pois, David A. Reed, Bruno Shueler, Rodney Smedt | 2024-01-16 |
| 10859519 | Methods and systems for measuring periodic structures using multi-angle x-ray reflectance scatterometry (XRS) | Heath A. Pois, David A. Reed, Bruno W. Schueler, Rodney Smedt | 2020-12-08 |
| 10746530 | Optical metrology device for measuring samples having thin or thick films | — | 2020-08-18 |
| 10481112 | Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) | Heath A. Pois, David A. Reed, Bruno W. Schueler, Rodney Smedt | 2019-11-19 |
| 10119925 | Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) | Heath A. Pois, David A. Reed, Bruno W. Schueler, Rodney Smedt | 2018-11-06 |
| 9588066 | Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) | Heath A. Pois, David A. Reed, Bruno W. Schueler, Rodney Smedt | 2017-03-07 |
| 9297771 | Methods and systems for fabricating platelets of a monochromator for X-ray photoelectron spectroscopy | Rodney Smedt, Bruno W. Schueler, David A. Reed | 2016-03-29 |
| 9240254 | System and method for characterizing a film by X-ray photoelectron and low-energy X-ray fluorescence spectroscopy | Bruno W. Schueler, David A. Reed, Rodney Smedt | 2016-01-19 |
| 7619741 | Modulated reflectance measurement system with multiple wavelengths | Lena Nicolaides, Alex Salnik, Jon Opsal | 2009-11-17 |
| 7423757 | Modulated reflectance measurement system with multiple wavelengths | Lena Nicolaides, Alex Salnik, Jon Opsal | 2008-09-09 |
| 7227637 | Measurement system with separate optimized beam paths | David Y. Wang, Lawrence D. Rotter, Jeffrey E. McAninch | 2007-06-05 |
| 7116424 | Modulated reflectance measurement system with multiple wavelengths | Lena Nicolaides, Alex Salnik, Jon Opsal | 2006-10-03 |
| 7106446 | Modulated reflectance measurement system with multiple wavelengths | Lena Nicolaides, Alex Salnik, Jon Opsal | 2006-09-12 |
| 7079249 | Modulated reflectance measurement system with fiber laser technology | Lena Nicolaides, Alex Salnik | 2006-07-18 |
| 7061614 | Measurement system with separate optimized beam paths | David Y. Wang, Lawrence D. Rotter, Jeffrey E. McAninch | 2006-06-13 |
| 7054006 | Self-calibrating beam profile ellipsometer | Haiming Wang, Lanhua Wei | 2006-05-30 |
| 6934025 | Thin film optical measurement system and method with calibrating ellipsometer | Jon Opsal, Craig E. Uhrich | 2005-08-23 |
| 6885019 | Sample positioning system to improve edge measurements | Craig E. Uhrich | 2005-04-26 |
| 6753962 | Thin film optical measurement system and method with calibrating ellipsometer | Jon Opsal, Craig E. Uhrich | 2004-06-22 |
| 6744850 | X-ray reflectance measurement system with adjustable resolution | Craig E. Uhrich, Louis N. Koppel | 2004-06-01 |
| 6707056 | Stage rotation system to improve edge measurements | Craig E. Uhrich | 2004-03-16 |
| 6515746 | Thin film optical measurement system and method with calibrating ellipsometer | Jon Opsal, Craig E. Uhrich | 2003-02-04 |
| 6411385 | Thin film optical measurement system and method with calibrating ellipsometer | David E. Aspnes, Jon Opsal | 2002-06-25 |
| 6304326 | Thin film optical measurement system and method with calibrating ellipsometer | David E. Aspnes, Jon Opsal | 2001-10-16 |