Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5900939 | Thin film optical measurement system and method with calibrating ellipsometer | David E. Aspnes, Jon Opsal | 1999-05-04 |
| 5798837 | Thin film optical measurement system and method with calibrating ellipsometer | David E. Aspnes, Jon Opsal | 1998-08-25 |
| 5596411 | Integrated spectroscopic ellipsometer | Jon Opsal | 1997-01-21 |
| 5181080 | Method and apparatus for evaluating the thickness of thin films | Jon Opsal, Allan Rosencwaig | 1993-01-19 |