Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7355708 | Normal incidence rotating compensator ellipsometer | — | 2008-04-08 |
| 7173700 | Normal incidence rotating compensator ellipsometer | — | 2007-02-06 |
| 6831743 | Broadband spectroscopic rotating compensator ellipsometer | Jon Opsal | 2004-12-14 |
| 6650415 | Broadband spectroscopic rotating compensator ellipsometer | Jon Opsal | 2003-11-18 |
| 6449043 | Broadband spectroscopic rotating compensator ellipsometer | Jon Opsal | 2002-09-10 |
| 6411381 | Method of reducing noise generated by arc lamps in optical systems employing slits | Martin Ebert | 2002-06-25 |
| 6411385 | Thin film optical measurement system and method with calibrating ellipsometer | Jon Opsal, Jeffrey T. Fanton | 2002-06-25 |
| 6320657 | Broadband spectroscopic rotating compensator ellipsometer | Jon Opsal | 2001-11-20 |
| 6304326 | Thin film optical measurement system and method with calibrating ellipsometer | Jon Opsal, Jeffrey T. Fanton | 2001-10-16 |
| 6181421 | Ellipsometer and polarimeter with zero-order plate compensator | Joanne Law | 2001-01-30 |
| 6134012 | Broadband spectroscopic rotating compensator ellipsometer | Jon Opsal | 2000-10-17 |
| 5973787 | Broadband spectroscopic rotating compensator ellipsometer | Jon Opsal | 1999-10-26 |
| 5900939 | Thin film optical measurement system and method with calibrating ellipsometer | Jon Opsal, Jeffrey T. Fanton | 1999-05-04 |
| 5877859 | Broadband spectroscopic rotating compensator ellipsometer | Jon Opsal | 1999-03-02 |
| 5798837 | Thin film optical measurement system and method with calibrating ellipsometer | Jon Opsal, Jeffrey T. Fanton | 1998-08-25 |
| 5277747 | Extraction of spatially varying dielectric function from ellipsometric data | — | 1994-01-11 |
| 5091320 | Ellipsometric control of material growth | William E. Quinn | 1992-02-25 |
| 4931132 | Optical control of deposition of crystal monolayers | Rajaram Bhat, Etienne G. Colas, Leigh T. Florez, James P. Harbison, Amabrose A. Studna | 1990-06-05 |
| 4492466 | Cylindrical grating monochromator for synchrotron radiation | — | 1985-01-08 |
| 4380490 | Method of preparing semiconductor surfaces | Ambrose A. Studna | 1983-04-19 |
| 4357179 | Method for producing devices comprising high density amorphous silicon or germanium layers by low pressure CVD technique | Arthur C. Adams, Brian G. Bagley | 1982-11-02 |
| 4332833 | Method for optical monitoring in materials fabrication | Brian G. Bagley | 1982-06-01 |