| 7355708 |
Normal incidence rotating compensator ellipsometer |
— |
2008-04-08 |
| 7173700 |
Normal incidence rotating compensator ellipsometer |
— |
2007-02-06 |
| 6831743 |
Broadband spectroscopic rotating compensator ellipsometer |
Jon Opsal |
2004-12-14 |
| 6650415 |
Broadband spectroscopic rotating compensator ellipsometer |
Jon Opsal |
2003-11-18 |
| 6449043 |
Broadband spectroscopic rotating compensator ellipsometer |
Jon Opsal |
2002-09-10 |
| 6411381 |
Method of reducing noise generated by arc lamps in optical systems employing slits |
Martin Ebert |
2002-06-25 |
| 6411385 |
Thin film optical measurement system and method with calibrating ellipsometer |
Jon Opsal, Jeffrey T. Fanton |
2002-06-25 |
| 6320657 |
Broadband spectroscopic rotating compensator ellipsometer |
Jon Opsal |
2001-11-20 |
| 6304326 |
Thin film optical measurement system and method with calibrating ellipsometer |
Jon Opsal, Jeffrey T. Fanton |
2001-10-16 |
| 6181421 |
Ellipsometer and polarimeter with zero-order plate compensator |
Joanne Law |
2001-01-30 |
| 6134012 |
Broadband spectroscopic rotating compensator ellipsometer |
Jon Opsal |
2000-10-17 |
| 5973787 |
Broadband spectroscopic rotating compensator ellipsometer |
Jon Opsal |
1999-10-26 |
| 5900939 |
Thin film optical measurement system and method with calibrating ellipsometer |
Jon Opsal, Jeffrey T. Fanton |
1999-05-04 |
| 5877859 |
Broadband spectroscopic rotating compensator ellipsometer |
Jon Opsal |
1999-03-02 |
| 5798837 |
Thin film optical measurement system and method with calibrating ellipsometer |
Jon Opsal, Jeffrey T. Fanton |
1998-08-25 |
| 5277747 |
Extraction of spatially varying dielectric function from ellipsometric data |
— |
1994-01-11 |
| 5091320 |
Ellipsometric control of material growth |
William E. Quinn |
1992-02-25 |
| 4931132 |
Optical control of deposition of crystal monolayers |
Rajaram Bhat, Etienne G. Colas, Leigh T. Florez, James P. Harbison, Amabrose A. Studna |
1990-06-05 |
| 4492466 |
Cylindrical grating monochromator for synchrotron radiation |
— |
1985-01-08 |
| 4380490 |
Method of preparing semiconductor surfaces |
Ambrose A. Studna |
1983-04-19 |
| 4357179 |
Method for producing devices comprising high density amorphous silicon or germanium layers by low pressure CVD technique |
Arthur C. Adams, Brian G. Bagley |
1982-11-02 |
| 4332833 |
Method for optical monitoring in materials fabrication |
Brian G. Bagley |
1982-06-01 |