Issued Patents All Time
Showing 25 most recent of 126 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8817260 | Modulated reflectance measurement system using UV probe | Lena Nicolaides, Alex Salnik, Allan Rosencwaig | 2014-08-26 |
| 8049903 | High resolution monitoring of CD variations | Ilya Grodnensky, Heath A. Pois | 2011-11-01 |
| 7982867 | Methods for depth profiling in semiconductors using modulated optical reflectance technology | Alex Salnik, Lena Nicolaides | 2011-07-19 |
| 7933026 | High resolution monitoring of CD variations | Ilya Grodnensky, Heath A. Pois | 2011-04-26 |
| 7747424 | Scatterometry multi-structure shape definition with multi-periodicity | Jingmin Leng | 2010-06-29 |
| 7705977 | Methods for depth profiling in semiconductors using modulated optical reflectance technology | Alex Salnik, Lena Nicolaides | 2010-04-27 |
| 7667841 | Detector configurations for optical metrology | — | 2010-02-23 |
| 7646486 | Modulated reflectance measurement system using UV probe | Lena Nicolaides, Alex Salnik, Allan Rosencwaig | 2010-01-12 |
| 7619741 | Modulated reflectance measurement system with multiple wavelengths | Lena Nicolaides, Jeffrey T. Fanton, Alex Salnik | 2009-11-17 |
| 7613598 | Global shape definition method for scatterometry | Hanyou Chu, Xuelong Cao, Youxian Wen | 2009-11-03 |
| 7567351 | High resolution monitoring of CD variations | Ilya Grodnensky, Heath A. Pois | 2009-07-28 |
| 7502104 | Probe beam profile modulated optical reflectance system and methods | Alex Salnik, Lena Nicolaides | 2009-03-10 |
| 7499168 | Combined modulated optical reflectance and electrical system for ultra-shallow junctions applications | Alex Salnik, Lena Nicolaides | 2009-03-03 |
| 7478019 | Multiple tool and structure analysis | Shahin Zangooie, Youxian Wen, Heath A. Pois | 2009-01-13 |
| 7456964 | Detector configurations for optical metrology | — | 2008-11-25 |
| 7436527 | Systems and methods for immersion metrology | — | 2008-10-14 |
| 7423757 | Modulated reflectance measurement system with multiple wavelengths | Lena Nicolaides, Jeffrey T. Fanton, Alex Salnik | 2008-09-09 |
| 7403022 | Method for measuring peak carrier concentration in ultra-shallow junctions | Alex Salnik, Lena Nicolaides, Mira Bakshi | 2008-07-22 |
| 7400403 | Beam profile ellipsometer with rotating compensator | — | 2008-07-15 |
| 7362441 | Modulated reflectance measurement system using UV probe | Lena Nicolaides, Alex Salnik, Allan Rosencwaig | 2008-04-22 |
| 7330260 | Method for measuring ion-implanted semiconductors with improved repeatability | Lena Nicolaides, Mira Bakshi, Alex Salnik | 2008-02-12 |
| 7280215 | Photothermal system with spectroscopic pump and probe | Alex Salnik, Lena Nicolaides | 2007-10-09 |
| 7248367 | Characterization of ultra shallow junctions in semiconductor wafers | Alex Salnik, Lena Nicolaides | 2007-07-24 |
| 7248375 | Critical dimension analysis with simultaneous multiple angle of incidence measurements | Allan Rosencwaig | 2007-07-24 |
| 7233390 | Scatterometry for samples with non-uniform edges | Yia-Chung Chang, Hanyou Chu | 2007-06-19 |