| 8817260 |
Modulated reflectance measurement system using UV probe |
Lena Nicolaides, Alex Salnik, Allan Rosencwaig |
2014-08-26 |
$15,302,000 |
| 8049903 |
High resolution monitoring of CD variations |
Ilya Grodnensky, Heath A. Pois |
2011-11-01 |
$22,175,000 |
| 7982867 |
Methods for depth profiling in semiconductors using modulated optical reflectance technology |
Alex Salnik, Lena Nicolaides |
2011-07-19 |
$41,267,000 |
| 7933026 |
High resolution monitoring of CD variations |
Ilya Grodnensky, Heath A. Pois |
2011-04-26 |
$13,337,000 |
| 7747424 |
Scatterometry multi-structure shape definition with multi-periodicity |
Jingmin Leng |
2010-06-29 |
$6,570,000 |
| 7705977 |
Methods for depth profiling in semiconductors using modulated optical reflectance technology |
Alex Salnik, Lena Nicolaides |
2010-04-27 |
$12,724,000 |
| 7667841 |
Detector configurations for optical metrology |
— |
2010-02-23 |
$17,468,000 |
| 7646486 |
Modulated reflectance measurement system using UV probe |
Lena Nicolaides, Alex Salnik, Allan Rosencwaig |
2010-01-12 |
$11,177,000 |
| 7619741 |
Modulated reflectance measurement system with multiple wavelengths |
Lena Nicolaides, Jeffrey T. Fanton, Alex Salnik |
2009-11-17 |
$48,733,000 |
| 7613598 |
Global shape definition method for scatterometry |
Hanyou Chu, Xuelong Cao, Youxian Wen |
2009-11-03 |
$24,430,000 |
| 7567351 |
High resolution monitoring of CD variations |
Ilya Grodnensky, Heath A. Pois |
2009-07-28 |
$13,191,000 |
| 7502104 |
Probe beam profile modulated optical reflectance system and methods |
Alex Salnik, Lena Nicolaides |
2009-03-10 |
$13,622,000 |
| 7499168 |
Combined modulated optical reflectance and electrical system for ultra-shallow junctions applications |
Alex Salnik, Lena Nicolaides |
2009-03-03 |
$9,395,000 |
| 7478019 |
Multiple tool and structure analysis |
Shahin Zangooie, Youxian Wen, Heath A. Pois |
2009-01-13 |
$11,529,000 |
| 7456964 |
Detector configurations for optical metrology |
— |
2008-11-25 |
$9,265,000 |
| 7436527 |
Systems and methods for immersion metrology |
— |
2008-10-14 |
$5,848,000 |
| 7423757 |
Modulated reflectance measurement system with multiple wavelengths |
Lena Nicolaides, Jeffrey T. Fanton, Alex Salnik |
2008-09-09 |
$8,361,000 |
| 7403022 |
Method for measuring peak carrier concentration in ultra-shallow junctions |
Alex Salnik, Lena Nicolaides, Mira Bakshi |
2008-07-22 |
$45,991,000 |
| 7400403 |
Beam profile ellipsometer with rotating compensator |
— |
2008-07-15 |
$17,332,000 |
| 7362441 |
Modulated reflectance measurement system using UV probe |
Lena Nicolaides, Alex Salnik, Allan Rosencwaig |
2008-04-22 |
$13,046,000 |
| 7330260 |
Method for measuring ion-implanted semiconductors with improved repeatability |
Lena Nicolaides, Mira Bakshi, Alex Salnik |
2008-02-12 |
$39,748,000 |
| 7280215 |
Photothermal system with spectroscopic pump and probe |
Alex Salnik, Lena Nicolaides |
2007-10-09 |
|
| 7248367 |
Characterization of ultra shallow junctions in semiconductor wafers |
Alex Salnik, Lena Nicolaides |
2007-07-24 |
|
| 7248375 |
Critical dimension analysis with simultaneous multiple angle of incidence measurements |
Allan Rosencwaig |
2007-07-24 |
|
| 7233390 |
Scatterometry for samples with non-uniform edges |
Yia-Chung Chang, Hanyou Chu |
2007-06-19 |
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