Issued Patents All Time
Showing 26–50 of 126 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7215431 | Systems and methods for immersion metrology | — | 2007-05-08 |
| 7212288 | Position modulated optical reflectance measurement system for semiconductor metrology | Lena Nicolaides, Alex Salnik | 2007-05-01 |
| 7206070 | Beam profile ellipsometer with rotating compensator | — | 2007-04-17 |
| 7206071 | Detector configurations for optical metrology | — | 2007-04-17 |
| 7145664 | Global shape definition method for scatterometry | Hanyou Chu, Xuelong Cao, Youxian Wen | 2006-12-05 |
| 7126690 | Modulated reflectance measurement system using UV probe | Lena Nicolaides, Alex Salnik, Allan Rosencwaig | 2006-10-24 |
| 7116424 | Modulated reflectance measurement system with multiple wavelengths | Lena Nicolaides, Jeffrey T. Fanton, Alex Salnik | 2006-10-03 |
| 7106446 | Modulated reflectance measurement system with multiple wavelengths | Lena Nicolaides, Jeffrey T. Fanton, Alex Salnik | 2006-09-12 |
| 7099007 | Method for determining ion concentration and energy of shallow junction implants | Minna Hovinen | 2006-08-29 |
| 7085676 | Feed forward critical dimension control | Youxian Wen | 2006-08-01 |
| 7061627 | Optical scatterometry of asymmetric lines and structures | Allan Rosencwaig | 2006-06-13 |
| 7050162 | Optical metrology tool having improved contrast | David Y. Wang | 2006-05-23 |
| 7038850 | CD metrology analysis using green's function | Yia-Chung Chang, Hanyou Chu | 2006-05-02 |
| 7031848 | Real time analysis of periodic structures on semiconductors | Hanyou Chu | 2006-04-18 |
| 7002690 | Ion implant monitoring through measurement of modulated optical response | Alex Salnik, Lena Nicolaides | 2006-02-21 |
| 6995842 | Detector configurations for optical metrology | — | 2006-02-07 |
| 6989896 | Standardized sample for characterizing the performance of a scatterometer | Youxian Wen, Cheryl Staat | 2006-01-24 |
| 6989899 | Ion implant monitoring through measurement of modulated optical response | Alex Salnik, Lena Nicolaides | 2006-01-24 |
| 6987832 | Calibration and alignment of X-ray reflectometric systems | Louis N. Koppel, Craig E. Uhrich | 2006-01-17 |
| 6982791 | Scatterometry to simultaneously measure critical dimensions and film properties | — | 2006-01-03 |
| 6972852 | Critical dimension analysis with simultaneous multiple angle of incidence measurements | Allan Rosencwaig | 2005-12-06 |
| 6963401 | Combination thermal wave and optical spectroscopy measurement systems | Minna Hovinen | 2005-11-08 |
| 6947850 | Real time analysis of periodic structures on semiconductors | Hanyou Chu | 2005-09-20 |
| 6934025 | Thin film optical measurement system and method with calibrating ellipsometer | Jeffrey T. Fanton, Craig E. Uhrich | 2005-08-23 |
| 6931361 | Real time analysis of periodic structures on semiconductors | Hanyou Chu | 2005-08-16 |