Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10533954 | Apparatus and methods for combined brightfield, darkfield, and photothermal inspection | Lena Nicolaides, Mohan Mahadevan, Scott A. Young | 2020-01-14 |
| 9772297 | Apparatus and methods for combined brightfield, darkfield, and photothermal inspection | Lena Nicolaides, Mohan Mahadevan, Scott A. Young | 2017-09-26 |
| 9232622 | Gas refraction compensation for laser-sustained plasma bulbs | Ilya Bezel, Anatoly Shchemelinin, Anant Chimmalgi | 2016-01-05 |
| 8962351 | Dopant metrology with information feedforward and feedback | Bin-Ming Benjamin Tsai, Lena Nicolaides | 2015-02-24 |
| 8853655 | Gas refraction compensation for laser-sustained plasma bulbs | Ilya Bezel, Anatoly Shchemelinin, Anant Chimmalgi | 2014-10-07 |
| 8817260 | Modulated reflectance measurement system using UV probe | Jon Opsal, Lena Nicolaides, Allan Rosencwaig | 2014-08-26 |
| 8535957 | Dopant metrology with information feedforward and feedback | Bin-Ming Benjamin Tsai, Lena Nicolaides | 2013-09-17 |
| 8436554 | LED solar illuminator | Guoheng Zhao, Ady Levy, Mehdi Vaez-Iravani, Lena Nicolaides, Samuel Ngai | 2013-05-07 |
| 8415961 | Measuring sheet resistance and other properties of a semiconductor | Guoheng Zhao, Lena Nicolaides, Ady Levy | 2013-04-09 |
| 8120776 | Measuring characteristics of ultra-shallow junctions | Lena Nicolaides | 2012-02-21 |
| 7982867 | Methods for depth profiling in semiconductors using modulated optical reflectance technology | Jon Opsal, Lena Nicolaides | 2011-07-19 |
| 7705977 | Methods for depth profiling in semiconductors using modulated optical reflectance technology | Jon Opsal, Lena Nicolaides | 2010-04-27 |
| 7646486 | Modulated reflectance measurement system using UV probe | Jon Opsal, Lena Nicolaides, Allan Rosencwaig | 2010-01-12 |
| 7619741 | Modulated reflectance measurement system with multiple wavelengths | Lena Nicolaides, Jeffrey T. Fanton, Jon Opsal | 2009-11-17 |
| 7502104 | Probe beam profile modulated optical reflectance system and methods | Lena Nicolaides, Jon Opsal | 2009-03-10 |
| 7499168 | Combined modulated optical reflectance and electrical system for ultra-shallow junctions applications | Lena Nicolaides, Jon Opsal | 2009-03-03 |
| 7423757 | Modulated reflectance measurement system with multiple wavelengths | Lena Nicolaides, Jeffrey T. Fanton, Jon Opsal | 2008-09-09 |
| 7403022 | Method for measuring peak carrier concentration in ultra-shallow junctions | Lena Nicolaides, Jon Opsal, Mira Bakshi | 2008-07-22 |
| 7362441 | Modulated reflectance measurement system using UV probe | Jon Opsal, Lena Nicolaides, Allan Rosencwaig | 2008-04-22 |
| 7330260 | Method for measuring ion-implanted semiconductors with improved repeatability | Lena Nicolaides, Mira Bakshi, Jon Opsal | 2008-02-12 |
| 7280215 | Photothermal system with spectroscopic pump and probe | Jon Opsal, Lena Nicolaides | 2007-10-09 |
| 7248367 | Characterization of ultra shallow junctions in semiconductor wafers | Lena Nicolaides, Jon Opsal | 2007-07-24 |
| 7212288 | Position modulated optical reflectance measurement system for semiconductor metrology | Jon Opsal, Lena Nicolaides | 2007-05-01 |
| 7126690 | Modulated reflectance measurement system using UV probe | Jon Opsal, Lena Nicolaides, Allan Rosencwaig | 2006-10-24 |
| 7116424 | Modulated reflectance measurement system with multiple wavelengths | Lena Nicolaides, Jeffrey T. Fanton, Jon Opsal | 2006-10-03 |