Issued Patents All Time
Showing 1–25 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11644756 | 3D structure inspection or metrology using deep learning | Scott A. Young, Kris Bhaskar | 2023-05-09 |
| 10599951 | Training a neural network for defect detection in low resolution images | Kris Bhaskar, Laurent Karsenti, Brad Ries, Richard (Seng Wee) Yeoh, Stephen Hiebert | 2020-03-24 |
| 10563973 | All surface film metrology system | Shifang Li, Paul Horn, Richard Graetz | 2020-02-18 |
| 10533954 | Apparatus and methods for combined brightfield, darkfield, and photothermal inspection | Mohan Mahadevan, Alex Salnik, Scott A. Young | 2020-01-14 |
| 9772297 | Apparatus and methods for combined brightfield, darkfield, and photothermal inspection | Mohan Mahadevan, Alex Salnik, Scott A. Young | 2017-09-26 |
| 9747520 | Systems and methods for enhancing inspection sensitivity of an inspection tool | Shifang Li, Youxian Wen, Sven Schwitalla, Prashant Aji | 2017-08-29 |
| 9709386 | Apparatus and methods for measuring properties in a TSV structure using beam profile reflectometry | Timothy Goodwin, Raul V. Tan, Shifang Li | 2017-07-18 |
| 9645097 | In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning | Ben-ming Benjamin Tsai, Prashant Aji, Michael Gasvoda, Stanley Stokowski, Guoheng Zhao +5 more | 2017-05-09 |
| 9640449 | Automated inline inspection of wafer edge strain profiles using rapid photoreflectance spectroscopy | Timothy Goodwin, Mohan Mahadevan, Paul Horn, Shifang Li | 2017-05-02 |
| 8962351 | Dopant metrology with information feedforward and feedback | Alex Salnik, Bin-Ming Benjamin Tsai | 2015-02-24 |
| 8817260 | Modulated reflectance measurement system using UV probe | Jon Opsal, Alex Salnik, Allan Rosencwaig | 2014-08-26 |
| 8535957 | Dopant metrology with information feedforward and feedback | Alex Salnik, Bin-Ming Benjamin Tsai | 2013-09-17 |
| 8436554 | LED solar illuminator | Guoheng Zhao, Ady Levy, Alex Salnik, Mehdi Vaez-Iravani, Samuel Ngai | 2013-05-07 |
| 8415961 | Measuring sheet resistance and other properties of a semiconductor | Guoheng Zhao, Alex Salnik, Ady Levy | 2013-04-09 |
| 8120776 | Measuring characteristics of ultra-shallow junctions | Alex Salnik | 2012-02-21 |
| 7982867 | Methods for depth profiling in semiconductors using modulated optical reflectance technology | Alex Salnik, Jon Opsal | 2011-07-19 |
| 7755752 | Combined modulated optical reflectance and photoreflectance system | Alexei Salnik | 2010-07-13 |
| 7705977 | Methods for depth profiling in semiconductors using modulated optical reflectance technology | Alex Salnik, Jon Opsal | 2010-04-27 |
| 7660686 | Ion implant metrology system with fault detection and identification | Alexei Salnik, Bin-Ming Benjamin Tsai | 2010-02-09 |
| 7646486 | Modulated reflectance measurement system using UV probe | Jon Opsal, Alex Salnik, Allan Rosencwaig | 2010-01-12 |
| 7619741 | Modulated reflectance measurement system with multiple wavelengths | Jeffrey T. Fanton, Alex Salnik, Jon Opsal | 2009-11-17 |
| 7502104 | Probe beam profile modulated optical reflectance system and methods | Alex Salnik, Jon Opsal | 2009-03-10 |
| 7499168 | Combined modulated optical reflectance and electrical system for ultra-shallow junctions applications | Alex Salnik, Jon Opsal | 2009-03-03 |
| 7423757 | Modulated reflectance measurement system with multiple wavelengths | Jeffrey T. Fanton, Alex Salnik, Jon Opsal | 2008-09-09 |
| 7403022 | Method for measuring peak carrier concentration in ultra-shallow junctions | Alex Salnik, Jon Opsal, Mira Bakshi | 2008-07-22 |