Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12265377 | Autonomous substrate processing system | Priyadarshi Panda, Lei Lian, Pengyu Han, Todd Egan, Eli Mor +2 more | 2025-04-01 |
| 12249525 | Using spectroscopic measurements for substrate temperature monitoring | Ian McDonald, Chengqing Wang, Shifang Li, Xinyuan Chong | 2025-03-11 |
| 11709477 | Autonomous substrate processing system | Priyadarshi Panda, Lei Lian, Pengyu Han, Todd Egan, Eli Mor +2 more | 2023-07-25 |
| 9747520 | Systems and methods for enhancing inspection sensitivity of an inspection tool | Shifang Li, Youxian Wen, Sven Schwitalla, Lena Nicolaides | 2017-08-29 |
| 9645097 | In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning | Lena Nicolaides, Ben-ming Benjamin Tsai, Michael Gasvoda, Stanley Stokowski, Guoheng Zhao +5 more | 2017-05-09 |
| 8765496 | Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis | Mehran Nasser-Ghodsi, Mark Borowicz, Dave Bakker, Mehdi Vaez-Iravani, Rudy F. Garcia +1 more | 2014-07-01 |
| 8705027 | Optical defect amplification for improved sensitivity on patterned layers | Steven R. Lange, Stephane Durant, Gregory L. Kirk, Robert M. Danen | 2014-04-22 |
| 7283659 | Apparatus and methods for searching through and analyzing defect images and wafer maps | David R. Bakker, James L. Belliveau, Chacko C. Neroth | 2007-10-16 |
| 7072786 | Inspection system setup techniques | David Bruce Coldren, David Randall, Sharon McCauley | 2006-07-04 |
| 6959251 | Inspection system setup techniques | David Bruce Coldren, David Randall, Sharon McCauley | 2005-10-25 |