MB

Mark Borowicz

KL Kla-Tencor: 4 patents #125 of 626Top 20%
Overall (All Time): #1,220,515 of 4,157,543Top 30%
4
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
8765496 Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis Mehran Nasser-Ghodsi, Dave Bakker, Mehdi Vaez-Iravani, Prashant Aji, Rudy F. Garcia +1 more 2014-07-01
7488938 Charge-control method and apparatus for electron beam imaging Alexander Jozef Gubbens, Ye Yang 2009-02-10
7365321 Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis Mehran Nasser-Ghodsi 2008-04-29
7304302 Systems configured to reduce distortion of a resist during a metrology process and systems and methods for reducing alteration of a specimen during analysis Peter Nunan, Muhran Nasser-Ghodsi, Rudy F. Garcia, Tzu-Chin Chuang, Herschel M. Marchman +1 more 2007-12-04