Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7304302 | Systems configured to reduce distortion of a resist during a metrology process and systems and methods for reducing alteration of a specimen during analysis | Peter Nunan, Mark Borowicz, Rudy F. Garcia, Tzu-Chin Chuang, Herschel M. Marchman +1 more | 2007-12-04 |