| 9773921 |
Combo amorphous and LTPS transistors |
Xuena Zhang |
2017-09-26 |
| 8470616 |
Patterned assembly for manufacturing a solar cell and a method thereof |
Paul Sullivan, Steven R. Walther |
2013-06-25 |
| 8461552 |
Active particle trapping for process control |
Gregory Redinbo, Julian G. Blake, Paul S. Buccos |
2013-06-11 |
| 8222053 |
Patterned assembly for manufacturing a solar cell and a method thereof |
Paul Sullivan, Steven R. Walther |
2012-07-17 |
| 7939424 |
Wafer bonding activated by ion implantation |
Yuri Erokhin, Paul Sullivan, Steven R. Walther |
2011-05-10 |
| 7820527 |
Cleave initiation using varying ion implant dose |
Steven R. Walther, Yuri Erokhin, Paul Sullivan |
2010-10-26 |
| 7820460 |
Patterned assembly for manufacturing a solar cell and a method thereof |
Paul Sullivan, Steven R. Walther |
2010-10-26 |
| 7619229 |
Technique for matching performance of ion implantation devices using an in-situ mask |
Bret W. Adams |
2009-11-17 |
| 7151018 |
Method and apparatus for transistor sidewall salicidation |
Sergey Lopatin |
2006-12-19 |
| 6861666 |
Apparatus and methods for determining and localization of failures in test structures using voltage contrast |
Kurt H. Weiner, Gaurav Verma, Indranil De |
2005-03-01 |
| 6855568 |
Apparatus and methods for monitoring self-aligned contact arrays using voltage contrast inspection |
Kurt H. Weiner, Sanjay Tandon |
2005-02-15 |
| 6797640 |
Method of utilizing hard mask for copper plasma etch |
Mark R. Tesauro |
2004-09-28 |
| 6355979 |
Hard mask for copper plasma etch |
Mark R. Tesauro |
2002-03-12 |
