Patents per Year
Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 8461552 | Active particle trapping for process control | Peter Nunan, Julian G. Blake, Paul S. Buccos | 2013-06-11 | |
| 6454860 | Deposition reactor having vaporizing, mixing and cleaning capabilities | Craig Metzner, Turgut Sahin, Pravin K. Narwankar, Patricia M. Liu | 2002-09-24 | $13,765,000 |
| 6374150 | Method and apparatus for monitoring and/or end point detecting a process | Jallepally Ravi, Michael Rivkin | 2002-04-16 | $57,634,000 |
| 6204203 | Post deposition treatment of dielectric films for interface control | Pravin K. Narwankar, Turgut Sahin, Patricia M. Liu, Huyen Tran | 2001-03-20 | $146,559,000 |
| 6130105 | Deposition rate control on wafers with varying characteristics | H. Peter W. Hey | 2000-10-10 | $151,729,000 |