Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8461552 | Active particle trapping for process control | Peter Nunan, Gregory Redinbo, Julian G. Blake | 2013-06-11 |
| 7544254 | System and method for cleaning an ion implanter | — | 2009-06-09 |
| 6909102 | Ion implanter system, method and program product including particle detection | — | 2005-06-21 |