Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8890066 | Sharp scattering angle trap for electron beam apparatus | Yehiel Gotkis, Garrett Pickard, Stanislaw Marek Borowicz, Mehran Nasser-Ghodsi | 2014-11-18 |
| 8765496 | Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis | Mehran Nasser-Ghodsi, Mark Borowicz, Dave Bakker, Mehdi Vaez-Iravani, Prashant Aji +1 more | 2014-07-01 |
| 7879730 | Etch selectivity enhancement in electron beam activated chemical etch | Mehran Naser-Ghodsi, Garrett Pickard, Rudy F. Garcia, Ming Lun Yu, Kenneth Krzeczowski +4 more | 2011-02-01 |
| 7709792 | Three-dimensional imaging using electron beam activated chemical etch | Mehran Naser-Ghodsi, Kenneth Krzeczowski, Matthew Lent, Chris Huang, Stanislaw Marek Borowicz | 2010-05-04 |
| 7304302 | Systems configured to reduce distortion of a resist during a metrology process and systems and methods for reducing alteration of a specimen during analysis | Peter Nunan, Muhran Nasser-Ghodsi, Mark Borowicz, Rudy F. Garcia, Herschel M. Marchman +1 more | 2007-12-04 |
| 5693983 | Thin-film structure with conductive molybdenum-chromium line | Jackson Ho, Robert Allen | 1997-12-02 |
| 5528082 | Thin-film structure with tapered feature | Jackson Ho, Robert Allen | 1996-06-18 |
| 5518805 | Hillock-free multilayer metal lines for high performance thin film structures | Jackson Ho, Ronald T. Fulks | 1996-05-21 |
| 5491347 | Thin-film structure with dense array of binary control units for presenting images | Robert Allen, Richard H. Bruce, Thomas G. Fiske, Ronald T. Fulks, Michael Hack +9 more | 1996-02-13 |