| 9513230 |
Apparatus and method for optical inspection, magnetic field and height mapping |
John Gerling, Edward Wagner, Mehran Nasser-Ghodsi, Tomas Plettner, Robert Haynes +1 more |
2016-12-06 |
| 8890066 |
Sharp scattering angle trap for electron beam apparatus |
Yehiel Gotkis, Stanislaw Marek Borowicz, Tzu-Chin Chuang, Mehran Nasser-Ghodsi |
2014-11-18 |
| 8052885 |
Structural modification using electron beam activated chemical etch |
Mehran Naser-Ghodsi, Rudy F. Garcia, Ming Lun Yu, Kenneth Krzeczowski, Matthew Lent +3 more |
2011-11-08 |
| 7879730 |
Etch selectivity enhancement in electron beam activated chemical etch |
Mehran Naser-Ghodsi, Rudy F. Garcia, Tzu-Chin Chuang, Ming Lun Yu, Kenneth Krzeczowski +4 more |
2011-02-01 |
| 7755042 |
Auger electron spectrometer with applied magnetic field at target surface |
Gabor Toth, Rudy F. Garcia, Chris Huang, Niles K. MacDonald, Mehran Nasser-Ghodsi +3 more |
2010-07-13 |