Issued Patents All Time
Showing 1–25 of 63 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9214344 | Pillar-supported array of micro electron lenses | Alan D. Brodie, Allen M. Carroll, Leonid Baranov | 2015-12-15 |
| 8890066 | Sharp scattering angle trap for electron beam apparatus | Garrett Pickard, Stanislaw Marek Borowicz, Tzu-Chin Chuang, Mehran Nasser-Ghodsi | 2014-11-18 |
| 8427185 | Inline inspection of photovoltaics for electrical defects | George H. Zapalac, Jr., Kirk J. Bertsche, David L. Brown, J. Kirkwood H. Rough, David Aitan Soltz | 2013-04-23 |
| 8206508 | Wet surface treatment by usage of a liquid bath containing energy limited bubbles | — | 2012-06-26 |
| 8128278 | Methods and apparatus for thin metal film thickness measurement | Mikhail Korolik | 2012-03-06 |
| 7945086 | Tungsten plug deposition quality evaluation method by EBACE technology | Sergey Lopatin, Mehran Nasser-Ghodsi | 2011-05-17 |
| 7906972 | Inline inspection of photovoltaics for electrical defects | George H. Zapalac, Jr., Kirk J. Bertsche, David L. Brown, J. Kirkwood H. Rough, David Aitan Soltz | 2011-03-15 |
| 7875548 | Method for making semiconductor structures implementing sacrificial material | David Wei, Rodney Kistler | 2011-01-25 |
| 7755061 | Dynamic pattern generator with cup-shaped structure | Luca Grella, Leonid Baranov | 2010-07-13 |
| 7649365 | Inline inspection of photovoltaics for electrical defects | George H. Zapalac, Jr., Kirk J. Bertsche, David L. Brown, J. Kirkwood H. Rough, David Aitan Soltz | 2010-01-19 |
| 7581875 | Method and apparatus for thin metal film thickness measurement | Mikhail Korolik | 2009-09-01 |
| 7528349 | Temperature stabilization for substrate processing | Arik Donde, Vincenzo Lordi | 2009-05-05 |
| 7425501 | Semiconductor structure implementing sacrificial material and methods for making and implementing the same | David Wei, Rodney Kistler | 2008-09-16 |
| 7309618 | Method and apparatus for real time metal film thickness measurement | Rodney Kistler, Aleksander Owczarz, David Hemker, Nicolas Bright | 2007-12-18 |
| 7204639 | Method and apparatus for thin metal film thickness measurement | Mikhail Korolik | 2007-04-17 |
| 7205166 | Method and apparatus of arrayed, clustered or coupled eddy current sensor configuration for measuring conductive film properties | Rodney Kistler, Aleksander Owczarz, Charles Freund | 2007-04-17 |
| 7166015 | Apparatus and method for controlling fluid material composition on a polishing pad | Danny Lim | 2007-01-23 |
| 7128803 | Integration of sensor based metrology into semiconductor processing tools | Aleksander Owczarz, Dave Hemker, Rodney Kistler | 2006-10-31 |
| 7084621 | Enhancement of eddy current based measurement capabilities | Rodney Kistler, Aleksander Owczarz, David Hemker, Nicolas Bright | 2006-08-01 |
| 7033250 | Method for chemical mechanical planarization | Aleksandar Owczarz, Rod Kistler | 2006-04-25 |
| 7029369 | End-point detection apparatus | Katrina Mikhaylich, Mike Ravkin | 2006-04-18 |
| 7010468 | Method and apparatus for slope to threshold conversion for process state monitoring and endpoint detection | Vladimir Katz, David Hemker, Rodney Kistler, Nicolas Bright | 2006-03-07 |
| 6994609 | Chemical mechanical planarization system with replaceable pad assembly | — | 2006-02-07 |
| 6984892 | Semiconductor structure implementing low-K dielectric materials and supporting stubs | David Wei, Rodney Kistler | 2006-01-10 |
| 6976906 | Apparatus for reducing compressed dry air usage during chemical mechanical planarization | John M. Boyd, David Wei | 2005-12-20 |