Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7033250 | Method for chemical mechanical planarization | Yehiel Gotkis, Rod Kistler | 2006-04-25 |
| 6767428 | Method and apparatus for chemical mechanical planarization | Yehiel Gotkis, Rod Kistler | 2004-07-27 |
| 6676493 | Integrated planarization and clean wafer processing system | Yehiel Gotkis | 2004-01-13 |