Issued Patents All Time
Showing 1–25 of 50 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10720343 | Method and apparatus for processing wafer-shaped articles | David Mui, Butch Berney, Alois Goller | 2020-07-21 |
| 8997684 | Prevention of particle adders when contacting a liquid meniscus over a substrate | Enrico Magni, Suresh Gupta, Mark Gahagan, Eric H. Lenz | 2015-04-07 |
| 8671959 | Method and apparatus for cleaning a substrate using non-newtonian fluids | John M. de Larios, Jeffrey Farber, Mikhail Korolik, Fred C. Redeker | 2014-03-18 |
| 8623152 | Reduction of entrance and exit marks left by a substrate-processing meniscus | Robert O'Donnell, John M. de Larios | 2014-01-07 |
| 8590550 | Apparatus for cleaning contaminants from substrate | Mikhail Korolik, Erik M. Freer, John M. de Larios, Katrina Mikhaylichenko, Fritz Redeker | 2013-11-26 |
| 8535451 | Method and apparatus for cleaning semiconductor wafers using compressed and/or pressurized foams, bubbles, and/or liquids | John M. de Larios, Jeffrey Farber, Mikhail Korolik, Fritz Redeker, Aleksander Owczarz | 2013-09-17 |
| 8534303 | Carrier for reducing entrance and/or exit marks left by a substrate-processing meniscus | Robert O'Donnell, Eric H. Lenz, Mark Wilcoxson, Alexander A. Yatskar | 2013-09-17 |
| 8317932 | Reduction of entrance and exit marks left by a substrate-processing meniscus | Robert O'Donnell, John M. de Larios | 2012-11-27 |
| 8313580 | Method for processing a substrate using a single phase proximity head having a controlled meniscus | Alex Kabansky, John M. de Larios | 2012-11-20 |
| 8242067 | Two-phase substrate cleaning material | Mikhail Korolik, Erik M. Freer, John M. de Larios, Katrina Mikhaylichenko, Fritz Redeker | 2012-08-14 |
| 8105441 | Carrier for reducing entrance and/or exit marks left by a substrate-processing meniscus | Robert O'Donnell, Eric H. Lenz, Mark Wilcoxson, Alexander A. Yatskar | 2012-01-31 |
| 8043441 | Method and apparatus for cleaning a substrate using non-Newtonian fluids | John M. de Larios, Jeffrey Farber, Mikhail Korolik, Fred C. Redeker | 2011-10-25 |
| 7997288 | Single phase proximity head having a controlled meniscus for treating a substrate | Alex Kabansky, John M. de Larios | 2011-08-16 |
| 7946303 | Carrier for reducing entrance and/or exit marks left by a substrate-processing meniscus | Robert O'Donnell, Eric H. Lenz, Mark Wilcoxson, Alexander A. Yatskar | 2011-05-24 |
| 7947157 | Apparatus and method for depositing and planarizing thin films of semiconductor wafers | John M. Boyd, Yezdi Dordi, Fred C. Redeker, John M. de Larios | 2011-05-24 |
| 7939139 | Methods for atomic layer deposition (ALD) using a proximity meniscus | Mikhail Korolik, Mark Wilcoxson | 2011-05-10 |
| 7897213 | Methods for contained chemical surface treatment | Katrina Mikhaylichenko, Fritz Redeker, John M. de Larios, Erik M. Freer, Mikhail Korolik | 2011-03-01 |
| 7799141 | Method and system for using a two-phases substrate cleaning compound | Mikhail Korolik, Erik M. Freer, John M. de Larios, Katrina Mikhaylichenko, Fritz Redeker | 2010-09-21 |
| 7780825 | Substrate gripper with integrated electrical contacts | Aleksander Owczarz, Robert Knop, Carl Woods | 2010-08-24 |
| 7703462 | Reduction of entrance and exit marks left by a substrate-processing meniscus | Robert O'Donnell, John M. de Larios | 2010-04-27 |
| 7632376 | Method and apparatus for atomic layer deposition (ALD) in a proximity system | Mikhail Korolik, Mark Wilcoxson | 2009-12-15 |
| 7614411 | Controls of ambient environment during wafer drying using proximity head | Mikhail Korolik, John M. de Larios, Jeffrey Farber | 2009-11-10 |
| 7591613 | Method and apparatus for transporting a substrate using non-newtonian fluid | John M. de Larios, John Parks, Mikhail Korolik, Fred C. Redeker | 2009-09-22 |
| 7568490 | Method and apparatus for cleaning semiconductor wafers using compressed and/or pressurized foams, bubbles, and/or liquids | John M. de Larios, Jeffrey Farber, Mikhail Korolik, Fritz Redeker, Aleksander Owczarz | 2009-08-04 |
| 7464719 | Multi-menisci processing apparatus | James P. Garcia, Carl Woods, Fred C. Redeker, John M. de Larios | 2008-12-16 |