Issued Patents All Time
Showing 1–25 of 83 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8726919 | Method and system for uniformly applying a multi-phase cleaning solution to a substrate | Jeffrey Farber, Ji Zhu, Carl Woods | 2014-05-20 |
| 8716210 | Material for cleaning a substrate | Erik M. Freer, Katrina Mikhaylichenko, Michael Ravkin, Mikhail Korolik, Fred C. Redeker | 2014-05-06 |
| 8691027 | Method for removing material from semiconductor wafer and apparatus for performing the same | Mikhail Korolik, Michael Ravkin, Fritz Redeker, John M. Boyd | 2014-04-08 |
| 8671959 | Method and apparatus for cleaning a substrate using non-newtonian fluids | Mike Ravkin, Jeffrey Farber, Mikhail Korolik, Fred C. Redeker | 2014-03-18 |
| 8623152 | Reduction of entrance and exit marks left by a substrate-processing meniscus | Robert O'Donnell, Mike Ravkin | 2014-01-07 |
| 8590550 | Apparatus for cleaning contaminants from substrate | Mikhail Korolik, Erik M. Freer, Katrina Mikhaylichenko, Mike Ravkin, Fritz Redeker | 2013-11-26 |
| 8567421 | Method and system for uniformly applying a multi-phase cleaning solution to a substrate | Jeffrey Farber, Ji Zhu, Carl Woods | 2013-10-29 |
| 8555903 | Method and apparatus for removing contamination from substrate | Erik M. Freer, Katrina Mikhaylichenko, Michael Ravkin, Mikhail Korolik, Fred C. Redeker +2 more | 2013-10-15 |
| 8535451 | Method and apparatus for cleaning semiconductor wafers using compressed and/or pressurized foams, bubbles, and/or liquids | Mike Ravkin, Jeffrey Farber, Mikhail Korolik, Fritz Redeker, Aleksander Owczarz | 2013-09-17 |
| 8522799 | Apparatus and system for cleaning a substrate | Erik M. Freer, Katrina Mikhaylichenko, Michael Ravkin, Mikhail Korolik, Fred C. Redeker +2 more | 2013-09-03 |
| 8480810 | Method and apparatus for particle removal | Erik M. Freer, Katrina Mikhaylichenko, Michael Ravkin, Mikhail Korolik, Fritz Redeker | 2013-07-09 |
| 8475599 | Substrate preparation using stabilized fluid solutions and methods for making stable fluid solutions | Erik M. Freer, Michael Ravkin, Mikhail Korolik, Katrina Mikhaylichenko, Fritz Redeker | 2013-07-02 |
| 8317932 | Reduction of entrance and exit marks left by a substrate-processing meniscus | Robert O'Donnell, Mike Ravkin | 2012-11-27 |
| 8313580 | Method for processing a substrate using a single phase proximity head having a controlled meniscus | Mike Ravkin, Alex Kabansky | 2012-11-20 |
| 8277675 | Method of damaged low-k dielectric film layer removal | Seokmin Yun, Seong Hwan Cho, Shrikant Lohokare, Mark Wilcoxson, Stephan Hoffmann | 2012-10-02 |
| 8242067 | Two-phase substrate cleaning material | Mikhail Korolik, Erik M. Freer, Katrina Mikhaylichenko, Mike Ravkin, Fritz Redeker | 2012-08-14 |
| 8236382 | Proximity substrate preparation sequence, and method, apparatus, and system for implementing the same | Michael Ravkin, Mikhail Korolik, Michael G. R. Smith, Carl Woods | 2012-08-07 |
| 8137474 | Cleaning compound and method and system for using the cleaning compound | Erik M. Freer, Katrina Mikhaylichenko, Michael Ravkin, Mikhail Korolik, Fred C. Redeker | 2012-03-20 |
| 8043441 | Method and apparatus for cleaning a substrate using non-Newtonian fluids | Mike Ravkin, Jeffrey Farber, Mikhail Korolik, Fred C. Redeker | 2011-10-25 |
| 8011116 | Substrate proximity drying using in-situ local heating of substrate | Katrina Mikhaylichenko, Kenneth C. Dodge, Mikhail Korolik, Michael Ravkin, Fritz Redeker | 2011-09-06 |
| 7997288 | Single phase proximity head having a controlled meniscus for treating a substrate | Mike Ravkin, Alex Kabansky | 2011-08-16 |
| 7975708 | Proximity head with angled vacuum conduit system, apparatus and method | Michael Ravkin, Fred C. Redeker, Mikhail Korolik, Erik M. Freer | 2011-07-12 |
| 7947157 | Apparatus and method for depositing and planarizing thin films of semiconductor wafers | Mike Ravkin, John M. Boyd, Yezdi Dordi, Fred C. Redeker | 2011-05-24 |
| 7913703 | Method and apparatus for uniformly applying a multi-phase cleaning solution to a substrate | Jeffrey Farber, Ji Zhu, Carl Woods | 2011-03-29 |
| 7897213 | Methods for contained chemical surface treatment | Katrina Mikhaylichenko, Mike Ravkin, Fritz Redeker, Erik M. Freer, Mikhail Korolik | 2011-03-01 |