Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8011116 | Substrate proximity drying using in-situ local heating of substrate | Katrina Mikhaylichenko, Mikhail Korolik, Michael Ravkin, John M. de Larios, Fritz Redeker | 2011-09-06 |
| 7806126 | Substrate proximity drying using in-situ local heating of substrate and substrate carrier point of contact, and methods, apparatus, and systems for implementing the same | Katrina Mikhaylichenko, Mikhail Korolik, Michael Ravkin, John M. de Larios, Fritz Redeker | 2010-10-05 |