| 10651097 |
Using identifiers to map edge ring part numbers onto slot numbers |
Evelio Sevillano, Thomas Chang, Ronda Ropes, Peter R. Wassei, Bridget Hill |
2020-05-12 |
$47,885,000 |
| 8935990 |
Low contamination components for semiconductor processing apparatus and methods for making components |
— |
2015-01-20 |
$36,525,000 |
| 8637408 |
In-situ reclaim of volatile components |
— |
2014-01-28 |
$9,231,000 |
| 8623152 |
Reduction of entrance and exit marks left by a substrate-processing meniscus |
Mike Ravkin, John M. de Larios |
2014-01-07 |
$5,237,000 |
| 8534303 |
Carrier for reducing entrance and/or exit marks left by a substrate-processing meniscus |
Eric H. Lenz, Mark Wilcoxson, Mike Ravkin, Alexander A. Yatskar |
2013-09-17 |
$6,583,000 |
| 8486841 |
Corrosion resistant component of semiconductor processing equipment and method of manufacture thereof |
Christopher C. Chang, John Daugherty |
2013-07-16 |
$5,810,000 |
| 8318327 |
Low contamination components for semiconductor processing apparatus and methods for making components |
— |
2012-11-27 |
$4,192,000 |
| 8317932 |
Reduction of entrance and exit marks left by a substrate-processing meniscus |
John M. de Larios, Mike Ravkin |
2012-11-27 |
$4,192,000 |
| 8313582 |
System, method and apparatus for maintaining separation of liquids in a controlled meniscus |
Cheng-Yu Lin, Arnold Kholodenko |
2012-11-20 |
$3,027,000 |
| 8309470 |
In-situ reclaim of volatile components |
— |
2012-11-13 |
$16,910,000 |
| 8141566 |
System, method and apparatus for maintaining separation of liquids in a controlled meniscus |
Cheng-Yu Lin, Arnold Kholodenko |
2012-03-27 |
$8,748,000 |
| 8105441 |
Carrier for reducing entrance and/or exit marks left by a substrate-processing meniscus |
Eric H. Lenz, Mark Wilcoxson, Mike Ravkin, Alexander A. Yatskar |
2012-01-31 |
$12,293,000 |
| 7946303 |
Carrier for reducing entrance and/or exit marks left by a substrate-processing meniscus |
Eric H. Lenz, Mark Wilcoxson, Mike Ravkin, Alexander A. Yatskar |
2011-05-24 |
$18,421,000 |
| 7703462 |
Reduction of entrance and exit marks left by a substrate-processing meniscus |
John M. de Larios, Mike Ravkin |
2010-04-27 |
$20,729,000 |
| 7605086 |
Corrosion resistant component of semiconductor processing equipment and method of manufacture thereof |
Christopher C. Chang, John Daugherty |
2009-10-20 |
$17,073,000 |
| 7503977 |
Solidifying layer for wafer cleaning |
Thomas W. Anderson |
2009-03-17 |
$16,470,000 |
| 7363727 |
Method for utilizing a meniscus in substrate processing |
— |
2008-04-29 |
$19,581,000 |
| 7311797 |
Productivity enhancing thermal sprayed yttria-containing coating for plasma reactor |
John Daugherty |
2007-12-25 |
|
| 7300537 |
Productivity enhancing thermal sprayed yttria-containing coating for plasma reactor |
John Daugherty |
2007-11-27 |
$41,713,000 |
| 7270760 |
Method and apparatus for simulating standard test wafers |
Gregory J. Goldspring |
2007-09-18 |
$12,150,000 |
| 7255898 |
Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereof |
Christopher C. Chang, John Daugherty |
2007-08-14 |
$26,661,000 |
| 7128804 |
Corrosion resistant component of semiconductor processing equipment and method of manufacture thereof |
Christopher C. Chang, John Daugherty |
2006-10-31 |
$8,256,000 |
| 7093375 |
Apparatus and method for utilizing a meniscus in substrate processing |
— |
2006-08-22 |
$17,847,000 |
| 6988326 |
Phobic barrier meniscus separation and containment |
Thomas W. Anderson |
2006-01-24 |
$17,411,000 |
| 6954993 |
Concentric proximity processing head |
Michael G. R. Smith, Michael Ravkin |
2005-10-18 |
$17,637,000 |
