Issued Patents All Time
Showing 25 most recent of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10651097 | Using identifiers to map edge ring part numbers onto slot numbers | Evelio Sevillano, Thomas Chang, Ronda Ropes, Peter R. Wassei, Bridget Hill | 2020-05-12 |
| 8935990 | Low contamination components for semiconductor processing apparatus and methods for making components | — | 2015-01-20 |
| 8637408 | In-situ reclaim of volatile components | — | 2014-01-28 |
| 8623152 | Reduction of entrance and exit marks left by a substrate-processing meniscus | Mike Ravkin, John M. de Larios | 2014-01-07 |
| 8534303 | Carrier for reducing entrance and/or exit marks left by a substrate-processing meniscus | Eric H. Lenz, Mark Wilcoxson, Mike Ravkin, Alexander A. Yatskar | 2013-09-17 |
| 8486841 | Corrosion resistant component of semiconductor processing equipment and method of manufacture thereof | Christopher C. Chang, John Daugherty | 2013-07-16 |
| 8318327 | Low contamination components for semiconductor processing apparatus and methods for making components | — | 2012-11-27 |
| 8317932 | Reduction of entrance and exit marks left by a substrate-processing meniscus | John M. de Larios, Mike Ravkin | 2012-11-27 |
| 8313582 | System, method and apparatus for maintaining separation of liquids in a controlled meniscus | Cheng-Yu Lin, Arnold Kholodenko | 2012-11-20 |
| 8309470 | In-situ reclaim of volatile components | — | 2012-11-13 |
| 8141566 | System, method and apparatus for maintaining separation of liquids in a controlled meniscus | Cheng-Yu Lin, Arnold Kholodenko | 2012-03-27 |
| 8105441 | Carrier for reducing entrance and/or exit marks left by a substrate-processing meniscus | Eric H. Lenz, Mark Wilcoxson, Mike Ravkin, Alexander A. Yatskar | 2012-01-31 |
| 7946303 | Carrier for reducing entrance and/or exit marks left by a substrate-processing meniscus | Eric H. Lenz, Mark Wilcoxson, Mike Ravkin, Alexander A. Yatskar | 2011-05-24 |
| 7703462 | Reduction of entrance and exit marks left by a substrate-processing meniscus | John M. de Larios, Mike Ravkin | 2010-04-27 |
| 7605086 | Corrosion resistant component of semiconductor processing equipment and method of manufacture thereof | Christopher C. Chang, John Daugherty | 2009-10-20 |
| 7503977 | Solidifying layer for wafer cleaning | Thomas W. Anderson | 2009-03-17 |
| 7363727 | Method for utilizing a meniscus in substrate processing | — | 2008-04-29 |
| 7311797 | Productivity enhancing thermal sprayed yttria-containing coating for plasma reactor | John Daugherty | 2007-12-25 |
| 7300537 | Productivity enhancing thermal sprayed yttria-containing coating for plasma reactor | John Daugherty | 2007-11-27 |
| 7270760 | Method and apparatus for simulating standard test wafers | Gregory J. Goldspring | 2007-09-18 |
| 7255898 | Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereof | Christopher C. Chang, John Daugherty | 2007-08-14 |
| 7128804 | Corrosion resistant component of semiconductor processing equipment and method of manufacture thereof | Christopher C. Chang, John Daugherty | 2006-10-31 |
| 7093375 | Apparatus and method for utilizing a meniscus in substrate processing | — | 2006-08-22 |
| 6988326 | Phobic barrier meniscus separation and containment | Thomas W. Anderson | 2006-01-24 |
| 6954993 | Concentric proximity processing head | Michael G. R. Smith, Michael Ravkin | 2005-10-18 |