Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10651097 | Using identifiers to map edge ring part numbers onto slot numbers | Thomas Chang, Robert O'Donnell, Ronda Ropes, Peter R. Wassei, Bridget Hill | 2020-05-12 |
| 9941178 | Methods for detecting endpoint for through-silicon via reveal applications | Alan J. Miller, Jorge Luque, Andrew D. Bailey, III, Qing Xu | 2018-04-10 |
| 9543225 | Systems and methods for detecting endpoint for through-silicon via reveal applications | Alan J. Miller, Jorge Luque, Andrew D. Bailey, III, Qing Xu | 2017-01-10 |
| 8900470 | Differential measurements for endpoint signal enhancement | — | 2014-12-02 |
| 5556475 | Microwave plasma reactor | Matthew Besen, Donald K. Smith | 1996-09-17 |
| 5518759 | High growth rate plasma diamond deposition process and method of controlling same | Lawrence P. Bourget, Richard S. Post | 1996-05-21 |
| 5501740 | Microwave plasma reactor | Matthew Besen, Donald K. Smith | 1996-03-26 |
| 5405645 | High growth rate plasma diamond deposition process and method of controlling same | Lawrence P. Bourget, Richard S. Post | 1995-04-11 |