Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12073224 | Autoconfiguration of hardware components of various modules of a substrate processing tool | Scott Baldwin, Thomas A. Stubblebine, Rainer Unterguggenberger, Raymond Chau | 2024-08-27 |
| 10658204 | Spin chuck with concentrated center and radial heating | Michael PUGGL, Gerhard Mueller, Henry Roger Osner, Karl-Heinz Hohenwarter, Ulrich Tschinderle +1 more | 2020-05-19 |
| 10651097 | Using identifiers to map edge ring part numbers onto slot numbers | Evelio Sevillano, Thomas Chang, Robert O'Donnell, Ronda Ropes, Peter R. Wassei | 2020-05-12 |
| 10312117 | Apparatus and radiant heating plate for processing wafer-shaped articles | Hongbo Si, Butch Berney, Daniel Brien | 2019-06-04 |
| 10068792 | Method and apparatus for liquid treatment of wafer shaped articles | Karl-Heinz Hohenwarter, Hongbo Si | 2018-09-04 |
| 9972514 | Apparatus for liquid treatment of wafer shaped articles | Dietmar Hammer, Reinhold SCHWARZENBACHER, Milan Pliska, Michael Brugger | 2018-05-15 |