Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10483010 | Reduction of surface and embedded substrate charge by controlled exposure to vacuum ultraviolet (VUV) light in low-oxygen environment | Rafal Dylewicz, Reinhold SCHWARZENBACHER, Xia Man, Kenichi Sano, David Lou | 2019-11-19 |
| 9972514 | Apparatus for liquid treatment of wafer shaped articles | Dietmar Hammer, Reinhold SCHWARZENBACHER, Bridget Hill, Michael Brugger | 2018-05-15 |
| 9779979 | Apparatus for liquid treatment of wafer shaped articles | Reinhold SCHWARZENBACHER | 2017-10-03 |