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2018-07-31 |
| 9997379 |
Method and apparatus for wafer wet processing |
Harald Kraus, Marco Nardoni |
2018-06-12 |
| 9972514 |
Apparatus for liquid treatment of wafer shaped articles |
Dietmar Hammer, Reinhold SCHWARZENBACHER, Milan Pliska, Bridget Hill |
2018-05-15 |
| 9887120 |
Apparatus for treating surfaces of wafer-shaped articles |
Andreas Gleissner, Thomas Wirnsberger |
2018-02-06 |
| 9685358 |
Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatus |
Ante Plazonic, Vijay Kumar Badam |
2017-06-20 |
| 9536770 |
Method and apparatus for liquid treatment of wafer shaped articles |
Karl-Heinz Hohenwarter, Dieter Spitaler, Gerald Anton |
2017-01-03 |
| 9245777 |
Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatus |
Ante Plazonic, Vijay Kumar Badam |
2016-01-26 |
| 9190310 |
Grounded chuck |
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2015-11-17 |
| 9093482 |
Method and apparatus for liquid treatment of wafer shaped articles |
Otto Lach, Olivier Postel |
2015-07-28 |
| 8974632 |
Device and method for treating wafer-shaped articles |
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2015-03-10 |
| 8936832 |
Device and method for wet treating plate-like-articles |
Alexander Schwarzfurtner |
2015-01-20 |
| 8888952 |
Apparatus for wet treatment of plate-like articles |
Markus Gigacher |
2014-11-18 |
| 8613288 |
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2013-12-24 |
| 8608146 |
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| 8231939 |
Device and method for wet treating plate-like-articles |
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| 8029641 |
Device and method for liquid treatment of wafer-shaped articles |
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| D493377 |
Retractable chalk line |
— |
2004-07-27 |