MB

Michael Brugger

Lam Research: 15 patents #187 of 2,128Top 9%
Infineon Technologies Ag: 2 patents #3,160 of 7,486Top 45%
Overall (All Time): #254,133 of 4,157,543Top 7%
18
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
11195695 Ion implantation method, ion implantation apparatus and semiconductor device Moriz Jelinek, Hans-Joachim Schulze, Werner Schustereder, Peter Zupan 2021-12-07
10037887 Method for implanting ions into a semiconductor substrate and an implantation system Moriz Jelinek, Johannes Georg Laven, Hans-Joachim Schulze, Werner Schustereder 2018-07-31
9997379 Method and apparatus for wafer wet processing Harald Kraus, Marco Nardoni 2018-06-12
9972514 Apparatus for liquid treatment of wafer shaped articles Dietmar Hammer, Reinhold SCHWARZENBACHER, Milan Pliska, Bridget Hill 2018-05-15
9887120 Apparatus for treating surfaces of wafer-shaped articles Andreas Gleissner, Thomas Wirnsberger 2018-02-06
9685358 Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatus Ante Plazonic, Vijay Kumar Badam 2017-06-20
9536770 Method and apparatus for liquid treatment of wafer shaped articles Karl-Heinz Hohenwarter, Dieter Spitaler, Gerald Anton 2017-01-03
9245777 Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatus Ante Plazonic, Vijay Kumar Badam 2016-01-26
9190310 Grounded chuck Otto Lach 2015-11-17
9093482 Method and apparatus for liquid treatment of wafer shaped articles Otto Lach, Olivier Postel 2015-07-28
8974632 Device and method for treating wafer-shaped articles Ulrich Tschinderle, Andreas Gleissner 2015-03-10
8936832 Device and method for wet treating plate-like-articles Alexander Schwarzfurtner 2015-01-20
8888952 Apparatus for wet treatment of plate-like articles Markus Gigacher 2014-11-18
8613288 High temperature chuck and method of using same Otto Lach 2013-12-24
8608146 Reinforced pin for being used in a pin chuck, and a pin chuck using such reinforced pin Otto Lach, Dietmar Hammer 2013-12-17
8231939 Device and method for wet treating plate-like-articles Alexander Schwarzfurtner 2012-07-31
8029641 Device and method for liquid treatment of wafer-shaped articles Andreas Baldy, Markus Gacher 2011-10-04
D493377 Retractable chalk line 2004-07-27