Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195695 | Ion implantation method, ion implantation apparatus and semiconductor device | Moriz Jelinek, Hans-Joachim Schulze, Werner Schustereder, Peter Zupan | 2021-12-07 |
| 10037887 | Method for implanting ions into a semiconductor substrate and an implantation system | Moriz Jelinek, Johannes Georg Laven, Hans-Joachim Schulze, Werner Schustereder | 2018-07-31 |
| 9997379 | Method and apparatus for wafer wet processing | Harald Kraus, Marco Nardoni | 2018-06-12 |
| 9972514 | Apparatus for liquid treatment of wafer shaped articles | Dietmar Hammer, Reinhold SCHWARZENBACHER, Milan Pliska, Bridget Hill | 2018-05-15 |
| 9887120 | Apparatus for treating surfaces of wafer-shaped articles | Andreas Gleissner, Thomas Wirnsberger | 2018-02-06 |
| 9685358 | Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatus | Ante Plazonic, Vijay Kumar Badam | 2017-06-20 |
| 9536770 | Method and apparatus for liquid treatment of wafer shaped articles | Karl-Heinz Hohenwarter, Dieter Spitaler, Gerald Anton | 2017-01-03 |
| 9245777 | Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatus | Ante Plazonic, Vijay Kumar Badam | 2016-01-26 |
| 9190310 | Grounded chuck | Otto Lach | 2015-11-17 |
| 9093482 | Method and apparatus for liquid treatment of wafer shaped articles | Otto Lach, Olivier Postel | 2015-07-28 |
| 8974632 | Device and method for treating wafer-shaped articles | Ulrich Tschinderle, Andreas Gleissner | 2015-03-10 |
| 8936832 | Device and method for wet treating plate-like-articles | Alexander Schwarzfurtner | 2015-01-20 |
| 8888952 | Apparatus for wet treatment of plate-like articles | Markus Gigacher | 2014-11-18 |
| 8613288 | High temperature chuck and method of using same | Otto Lach | 2013-12-24 |
| 8608146 | Reinforced pin for being used in a pin chuck, and a pin chuck using such reinforced pin | Otto Lach, Dietmar Hammer | 2013-12-17 |
| 8231939 | Device and method for wet treating plate-like-articles | Alexander Schwarzfurtner | 2012-07-31 |
| 8029641 | Device and method for liquid treatment of wafer-shaped articles | Andreas Baldy, Markus Gacher | 2011-10-04 |
| D493377 | Retractable chalk line | — | 2004-07-27 |