Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9685358 | Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatus | Vijay Kumar Badam, Michael Brugger | 2017-06-20 |
| 9245777 | Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatus | Vijay Kumar Badam, Michael Brugger | 2016-01-26 |
| 8899246 | Device and method for processing wafer shaped articles | Christian AUFEGGER, Reinhold SCHWARZENBACHER | 2014-12-02 |