Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10483010 | Reduction of surface and embedded substrate charge by controlled exposure to vacuum ultraviolet (VUV) light in low-oxygen environment | Rafal Dylewicz, Xia Man, Kenichi Sano, David Lou, Milan Pliska | 2019-11-19 |
| 10134611 | Collector for use with an apparatus for treating wafer-shaped articles | Ulrich Tschinderle | 2018-11-20 |
| 9972514 | Apparatus for liquid treatment of wafer shaped articles | Dietmar Hammer, Milan Pliska, Bridget Hill, Michael Brugger | 2018-05-15 |
| 9779979 | Apparatus for liquid treatment of wafer shaped articles | Milan Pliska | 2017-10-03 |
| 9698029 | Method and apparatus for processing wafer-shaped articles | Christian Putzi | 2017-07-04 |
| 9484229 | Device and method for processing wafer-shaped articles | Otto Lach, Christian AUFEGGER | 2016-11-01 |
| 8899246 | Device and method for processing wafer shaped articles | Ante Plazonic, Christian AUFEGGER | 2014-12-02 |