Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198945 | Vapor delivery head for preventing stiction of high aspect ratio structures and/or repairing high aspect ratio structures | Bhaskar BANDARAPU, David Mui, Karl-Heinz Hohenwarter, Butch Berney, Nathan Lavdovsky +4 more | 2025-01-14 |
| 9698029 | Method and apparatus for processing wafer-shaped articles | Reinhold SCHWARZENBACHER | 2017-07-04 |
| 7270510 | Device and method for transporting wafer-shaped articles | — | 2007-09-18 |
| 6601659 | Twist drill | Robert S. Saitta, Troy D. Wells | 2003-08-05 |