Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198945 | Vapor delivery head for preventing stiction of high aspect ratio structures and/or repairing high aspect ratio structures | Bhaskar BANDARAPU, David Mui, Butch Berney, Nathan Lavdovsky, Christian Putzi +4 more | 2025-01-14 |
| 10658204 | Spin chuck with concentrated center and radial heating | Bridget Hill, Michael PUGGL, Gerhard Mueller, Henry Roger Osner, Ulrich Tschinderle +1 more | 2020-05-19 |
| 10068792 | Method and apparatus for liquid treatment of wafer shaped articles | Bridget Hill, Hongbo Si | 2018-09-04 |
| 9536770 | Method and apparatus for liquid treatment of wafer shaped articles | Michael Brugger, Dieter Spitaler, Gerald Anton | 2017-01-03 |
| 9355883 | Method and apparatus for liquid treatment of wafer shaped articles | Lach Otto | 2016-05-31 |
| 9316443 | Method and apparatus for liquid treatment of wafer shaped articles | Vijay Kumar Badam, Christoph SEMMELROCK | 2016-04-19 |
| 8955529 | Device and method for wet treating disc-shaped articles | — | 2015-02-17 |
| 8926788 | Closed chamber for wafer wet processing | — | 2015-01-06 |
| 7837803 | Device and method for wet treating disc-shaped articles | — | 2010-11-23 |
| 7122084 | Device for liquid treatment of disk-shaped objects | — | 2006-10-17 |