Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198945 | Vapor delivery head for preventing stiction of high aspect ratio structures and/or repairing high aspect ratio structures | David Mui, Karl-Heinz Hohenwarter, Butch Berney, Nathan Lavdovsky, Christian Putzi +4 more | 2025-01-14 |
| 10167552 | Spin chuck with rotating gas showerhead | Andreas Gleissner, Markus JUNK | 2019-01-01 |
| 9911630 | Apparatus for treating surfaces of wafer-shaped articles | Andreas Gleissner | 2018-03-06 |
| 9887122 | Method and apparatus for processing wafer-shaped articles | Hongbo Si, Andreas Gleissner, Bernhard Loidl | 2018-02-06 |
| 9597703 | Slit nozzle | Stefan Detterbeck, Thomas Passegger, Richard Findenig | 2017-03-21 |