Issued Patents All Time
Showing 25 most recent of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12428746 | Distribution system for a process fluid for chemical and/or electrolytic surface treatment of a substrate | Harald Modl | 2025-09-30 |
| 12351921 | Distribution body for a process fluid for chemical and/or electrolytic surface treatment of a substrate | Philipp Engesser, Harald Okorn-Schmidt | 2025-07-08 |
| 12351935 | Distribution system for a process fluid for chemical and/or electrolytic surface treatment of a substrate | Georg Hofer, Marianne Kolitsch-MataIn | 2025-07-08 |
| 12261075 | Substrate handling device for a wafer | Manuel Eibl, Herbert Oetzlinger | 2025-03-25 |
| 11965263 | Substrate holding and locking system for chemical and/or electrolytic surface treatment | Herbert Ötzlinger, Oliver Knoll, Raoul Schröder, Markus Gersdorff, Thomas Wirnsberger +1 more | 2024-04-23 |
| 11938522 | Module for chemically processing a substrate | Herbert Ötzlinger, Raoul Schröder, Oliver Knoll | 2024-03-26 |
| 11942356 | Clipping mechanism for fastening a substrate for a surface treatment of the substrate | Ulrich Tschinderle | 2024-03-26 |
| 11908698 | Method and device for plating a recess in a substrate | Franz Markut, Thomas Wirnsberger, Oliver Knoll, Harald Okorn-Schmidt, Philipp Engesser | 2024-02-20 |
| 11566337 | Substrate locking system, device and procedure for chemical and/or electrolytic surface treatment | Thomas Wirnsberger, Herbert Ötzlinger | 2023-01-31 |
| 11195730 | Method and apparatus for processing wafer-shaped articles | Rainer Obweger, Thomas Wirnsberger, Franz Kumnig, Alessandro Baldaro, Christian Thomas Fischer +4 more | 2021-12-07 |
| 11164748 | Method and device for plating a recess in a substrate | Franz Markut, Thomas Wirnsberger, Oliver Knoll, Harald Okorn-Schmidt, Philipp Engesser | 2021-11-02 |
| 11136687 | Substrate locking system, device and procedure for chemical and/or electrolytic surface treatment | Thomas Wimsberger, Herbert Ötzlinger | 2021-10-05 |
| 11105014 | Distribution system for chemical and/or electrolytic surface treatment | Franz Markut, Herbert Ötzlinger | 2021-08-31 |
| 10490426 | Method and apparatus for processing wafer-shaped articles | Rainer Obweger, Thomas Wirnsberger, Franz Kumnig, Alessandro Baldaro, Christian Thomas Fischer +4 more | 2019-11-26 |
| 10269615 | Apparatus for treating surfaces of wafer-shaped articles | Ulrich Tschinderle, Thomas Wirnsberger, Rainer Obweger | 2019-04-23 |
| 10167552 | Spin chuck with rotating gas showerhead | Markus JUNK, Bhaskar BANDARAPU | 2019-01-01 |
| 10056287 | Apparatus for treating surfaces of wafer-shaped articles | Ulrich Tschinderle, Thomas Wirnsberger, Rainer Obweger | 2018-08-21 |
| 9968970 | Spin chuck with in situ cleaning capability | Peter Strutzmann | 2018-05-15 |
| 9911630 | Apparatus for treating surfaces of wafer-shaped articles | Bhaskar BANDARAPU | 2018-03-06 |
| 9887120 | Apparatus for treating surfaces of wafer-shaped articles | Michael Brugger, Thomas Wirnsberger | 2018-02-06 |
| 9887122 | Method and apparatus for processing wafer-shaped articles | Hongbo Si, Bhaskar BANDARAPU, Bernhard Loidl | 2018-02-06 |
| 9657397 | Apparatus for treating surfaces of wafer-shaped articles | — | 2017-05-23 |
| 9633890 | Device for treating surfaces of wafer-shaped articles and gripping pin for use in the device | Ulrich Tschinderle, Thomas Wirnsberger, Franz Kumnig, Rainer Obweger | 2017-04-25 |
| 9597701 | Apparatus for treating surfaces of wafer-shaped articles | Rainer Obweger, Philipp Engesser | 2017-03-21 |
| 9548223 | Apparatus for treating surfaces of wafer-shaped articles | Dieter Frank, Robert Rogatschnig | 2017-01-17 |