Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9418883 | Device for holding wafer shaped articles | Thomas Wirnsberger | 2016-08-16 |
| 8974632 | Device and method for treating wafer-shaped articles | Ulrich Tschinderle, Michael Brugger | 2015-03-10 |
| 8485204 | Closed chamber with fluid separation feature | Rainer Obweger | 2013-07-16 |