Issued Patents All Time
Showing 25 most recent of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12291779 | Methods of selective atomic layer deposition | Bhaskar Jyoti Bhuyan, Mark Saly, David Thompson, Kurt Fredrickson, Thomas Knisley +1 more | 2025-05-06 |
| 12261039 | Method of linearized film oxidation growth | Christopher S. Olsen | 2025-03-25 |
| 12139790 | Processing system and method of delivering a reactant gas | Vishwas Kumar Pandey, Christopher S. Olsen, Rene George, Eric Kihara Shono, Lara Hawrylchak +3 more | 2024-11-12 |
| D1023987 | Chamber inlet | Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Hansel LO, Agus Sofian Tjandra +1 more | 2024-04-23 |
| 11959169 | Asymmetric injection for better wafer uniformity | Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Kartik Shah, Hansel LO +3 more | 2024-04-16 |
| 11821085 | Methods of selective atomic layer deposition | Bhaskar Jyoti Bhuyan, Mark Saly, David Thompson, Kurt Fredrickson, Thomas Knisley +1 more | 2023-11-21 |
| 11735420 | Wafer treatment for achieving defect-free self-assembled monolayers | Chang Ke, Lei Zhou, Biao Liu, Cheng Pan, Yuanhong Guo +5 more | 2023-08-22 |
| 11732355 | Method and apparatus for supplying improved gas flow to a processing volume of a processing chamber | Vishwas Kumar Pandey, Eric Kihara Shono, Kartik Shah, Christopher S. Olsen, Agus Sofian Tjandra +2 more | 2023-08-22 |
| 11725274 | Integrated cluster tool for selective area deposition | Srinivas D. Nemani, Ludovic Godet, Qiwei Liang, Adib Khan | 2023-08-15 |
| 11610776 | Method of linearized film oxidation growth | Christopher S. Olsen | 2023-03-21 |
| 11501945 | Side inject designs for improved radical concentrations | Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Hansel LO, Agus Sofian Tjandra +1 more | 2022-11-15 |
| 11486038 | Asymmetric injection for better wafer uniformity | Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Kartik Shah, Hansel LO +3 more | 2022-11-01 |
| 11066747 | Chemical delivery chamber for self-assembled monolayer processes | Qiwei Liang, Adib Khan, Srinivas D. Nemani, Ludovic Godet | 2021-07-20 |
| D924825 | Chamber inlet | Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Hansel LO, Agus Sofian Tjandra +1 more | 2021-07-13 |
| 10954594 | High temperature vapor delivery system and method | Viachslav Babayan, Qiwei Liang, Ludovic Godet, Srinivas D. Nemani | 2021-03-23 |
| 10947621 | Low vapor pressure chemical delivery | Adib Khan, Qiwei Liang, Srinivas D. Nemani | 2021-03-16 |
| 10847337 | Side inject designs for improved radical concentrations | Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Hansel LO, Agus Sofian Tjandra +1 more | 2020-11-24 |
| 10818510 | Self-assembled monolayer blocking with intermittent air-water exposure | Keith Tatseun Wong | 2020-10-27 |
| 10770292 | Wafer treatment for achieving defect-free self-assembled monolayers | Chang Ke, Lei Zhou, Biao Liu, Cheng Pan, Yuanhong Guo +5 more | 2020-09-08 |
| 10483097 | Method for cleaning, passivation and functionalization of Si—Ge semiconductor surfaces | Andrew C. Kummel, Kiarash Kiantaj | 2019-11-19 |
| 10366878 | Selective deposition through formation of self-assembled monolayers | Jessica S. Kachian, David Thompson | 2019-07-30 |
| 10358715 | Integrated cluster tool for selective area deposition | Srinivas D. Nemani, Ludovic Godet, Qiwei Liang, Adib Khan | 2019-07-23 |
| 10192752 | Self-assembled monolayer blocking with intermittent air-water exposure | Keith Tatseun Wong | 2019-01-29 |
| 10134585 | Low temperature atomic layer deposition of oxides on compound semiconductors | Kasra Sardashti, Tyler Kent, Andrew C. Kummel, Shariq Siddiqui, Bhagawan Sahu +2 more | 2018-11-20 |
| 9947539 | Plasma poisoning to enable selective deposition | Ludovic Godet, Srinivas D. Nemani | 2018-04-17 |