Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12313180 | Gas flow valve and methods of operating thereof | — | 2025-05-27 |
| 12169163 | Detection of surface particles on chamber components with carbon dioxide | Changgong Wang, Zhili Zuo, Song-Moon Suh | 2024-12-17 |
| 12024770 | Methods for selective deposition using self-assembled monolayers | Wenyu Zhang, Liqi Wu | 2024-07-02 |
| 11815436 | Detection of surface particles on chamber components with carbon dioxide | Changgong Wang, Zhili Zuo, Song-Moon Suh | 2023-11-14 |
| 11735420 | Wafer treatment for achieving defect-free self-assembled monolayers | Lei Zhou, Biao Liu, Cheng Pan, Yuanhong Guo, Liqi Wu +5 more | 2023-08-22 |
| 11515155 | Methods for enhancing selectivity in SAM-based selective deposition | Michael S. Jackson, Liqi Wu, Lei Zhou, Shuyi Zhang, David Thompson +3 more | 2022-11-29 |
| 11508610 | Substrate support with edge seal | Bonnie T. Chia, Song-Moon Suh, Cheng-Hsiung Tsai, Yuanhong Guo, Lei Zhou +1 more | 2022-11-22 |
| 11441974 | Detection of surface particles on chamber components with carbon dioxide | Changgong Wang, Zhili Zuo, Song-Moon Suh | 2022-09-13 |
| 11194244 | Extreme ultraviolet mask absorber and processes for manufacture | Shuwei Liu, Wen Xiao, Vibhu Jindal | 2021-12-07 |
| 11033930 | Methods and apparatus for cryogenic gas stream assisted SAM-based selective deposition | Song-Moon Suh, Liqi Wu, Michael S. Jackson, Lei Zhou, Biao Liu +3 more | 2021-06-15 |
| 10950433 | Methods for enhancing selectivity in SAM-based selective deposition | Michael S. Jackson, Liqi Wu, Lei Zhou, Shuyi Zhang, David Thompson +3 more | 2021-03-16 |
| 10892161 | Enhanced selective deposition process | Biao Liu, Cheng Pan, Erica Chen, Srinivas D. Nemani, Lei Zhou | 2021-01-12 |
| 10770292 | Wafer treatment for achieving defect-free self-assembled monolayers | Lei Zhou, Biao Liu, Cheng Pan, Yuanhong Guo, Liqi Wu +5 more | 2020-09-08 |
| 10643840 | Selective deposition defects removal by chemical etch | Jeffrey W. Anthis, Pratham Jain, Benjamin Schmiege, Guoqiang Jian, Michael S. Jackson +3 more | 2020-05-05 |
| 9274570 | Positioning apparatus for expansion card | SHENG-HE LI, XIAO-WEN DUAN, Da-Long Sun | 2016-03-01 |