Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12169163 | Detection of surface particles on chamber components with carbon dioxide | Changgong Wang, Chang Ke, Song-Moon Suh | 2024-12-17 |
| 11815436 | Detection of surface particles on chamber components with carbon dioxide | Changgong Wang, Chang Ke, Song-Moon Suh | 2023-11-14 |
| 11441974 | Detection of surface particles on chamber components with carbon dioxide | Changgong Wang, Chang Ke, Song-Moon Suh | 2022-09-13 |
| 10755903 | RPS defect reduction by cyclic clean induced RPS cooling | Sidharth Bhatia, Hidehiro Kojiri, Anjana M. Patel, Song-Moon Suh, Ganesh Balasubramanian | 2020-08-25 |