Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12169163 | Detection of surface particles on chamber components with carbon dioxide | Zhili Zuo, Chang Ke, Song-Moon Suh | 2024-12-17 |
| 12094716 | Chambers and coatings for reducing backside damage | Leonard Tedeschi, Kartik Ramaswamy, Benjamin Schwarz, Vahid Firouzdor, Sumanth Banda +1 more | 2024-09-17 |
| 11815436 | Detection of surface particles on chamber components with carbon dioxide | Zhili Zuo, Chang Ke, Song-Moon Suh | 2023-11-14 |
| 11495440 | Plasma density control on substrate edge | Bhaskar Kumar, Prashanth Kothnur, Sidharth Bhatia, Anup K. Singh, Vivek Shah +1 more | 2022-11-08 |
| 11441974 | Detection of surface particles on chamber components with carbon dioxide | Zhili Zuo, Chang Ke, Song-Moon Suh | 2022-09-13 |
| 10790121 | Plasma density control on substrate edge | Bhaskar Kumar, Prashanth Kothnur, Sidharth Bhatia, Anup K. Singh, Vivek Shah +1 more | 2020-09-29 |