Issued Patents All Time
Showing 1–25 of 112 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400843 | Chamber configurations and processes for particle control | Fei Wu, Abdul Aziz Khaja, Sungwon Ha, Vinay Prabhakar | 2025-08-26 |
| 12381106 | Systems and methods of seasoning electrostatic chucks with dielectric seasoning films | Akhil Singhal, Allison Yau, Zeqiong Zhao, Sang Jin Kim, Zhijun Jiang +1 more | 2025-08-05 |
| 12366853 | Sensor metrology data integration | Sidharth Bhatia, Garrett H. Sin, Heng-Cheng Pai, Pramod Nambiar, Irfan Jamil | 2025-07-22 |
| 12366147 | Electrical gas lift valves and assemblies | Oguzhan Guven, Jason Bigelow, Naomi Crawford, Yann Dufour, Maria Tafur +1 more | 2025-07-22 |
| 12315724 | Helium-free silicon formation | Zeqiong Zhao, Allison Yau, Sang Jin Kim, Akhil Singhal, Zhijun Jiang +1 more | 2025-05-27 |
| 12211908 | Profile shaping for control gate recesses | Akhil Singhal, Allison Yau, Sang Jin Kim, Zeqiong Zhao, Zhijun Jiang +1 more | 2025-01-28 |
| 12148585 | Vacuum interrupter conductor assembly with integrated Thomson coil | Santhosh Kumar Chamarajanagar Govinda Nayaka, Robert Michael Slepian, Xin Zhou, Jayaraman Muniyappan | 2024-11-19 |
| 12106958 | Method of using dual frequency RF power in a process chamber | Anup K. Singh, Rick Kustra, Vinayak Vishwanath Hassan, Bhaskar Kumar, Krishna Nittala +2 more | 2024-10-01 |
| 12094689 | Switchable delivery for semiconductor processing system | Sai Susmita Addepalli, Yue Chen, Abhigyan Keshri, Qiang Ma, Zhijun Jiang +2 more | 2024-09-17 |
| 12031416 | Flow control module for sand control management | Maria Tafur, Amrendra Kumar, Raghuram C. Kamath, Benoit Deville, Michael Dean Langlais | 2024-07-09 |
| 12020911 | Chucking process and system for substrate processing chambers | Bhaskar Kumar, Vivek Shah, Jiheng Zhao | 2024-06-25 |
| 12002702 | Wafer de-chucking detection and arcing prevention | Byung Chul Yoon, Hemant P. Mungekar | 2024-06-04 |
| 11898249 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2024-02-13 |
| 11894228 | Treatments for controlling deposition defects | Sudha Rathi, Nagarajan Rajagopalan, Abdul Aziz Khaja, Prashanthi Para, Hiral D. Tailor | 2024-02-06 |
| 11875969 | Process chamber with reduced plasma arc | Fei Wu, Abdul Aziz Khaja, Sungwon Ha, Vinay Prabhakar | 2024-01-16 |
| 11862419 | Toroidal encapsulation for high voltage vacuum interrupters | Eric Dennis Smith, Louis G. Campbell, Wangpei Li, Xin Zhou | 2024-01-02 |
| 11859275 | Techniques to improve adhesion and defects for tungsten carbide film | Vivek Shah, Anup K. Singh, Bhaskar Kumar | 2024-01-02 |
| 11837448 | High-temperature chamber and chamber component cleaning and maintenance method and apparatus | Shuran Sheng, Lin Zhang, Jiyong Huang, Jang Seok OH, Joseph C. Werner +4 more | 2023-12-05 |
| 11814928 | Isolation valves | Ashish Sharma | 2023-11-14 |
| 11798820 | Gas delivery systems and methods | Diwakar Kedlaya, Fang Ruan, Zubin Huang, Kaushik Alayavalli, Martin Jay Seamons +3 more | 2023-10-24 |
| 11784229 | Profile shaping for control gate recesses | Akhil Singhal, Allison Yau, Sang Jin Kim, Zeqiong Zhao, Zhijun Jiang +1 more | 2023-10-10 |
| 11757846 | Cognitive multi-encrypted mail platform | Madhusudhanan Krishnamoorthy | 2023-09-12 |
| 11742169 | Ultra-fast moving conductor with removable core pin | Andrew L. Gottschalk, Robert Michael Slepian, Andrew Deutsch | 2023-08-29 |
| 11721545 | Method of using dual frequency RF power in a process chamber | Anup K. Singh, Rick Kustra, Vinayak Vishwanath Hassan, Bhaskar Kumar, Krishna Nittala +2 more | 2023-08-08 |
| 11699577 | Treatment for high-temperature cleans | Sarah Michelle Bobek, Ruiyun Huang, Abdul Aziz Khaja, Amit Kumar BANSAL, Dong-Hyung LEE +6 more | 2023-07-11 |