Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12002702 | Wafer de-chucking detection and arcing prevention | Ganesh Balasubramanian, Hemant P. Mungekar | 2024-06-04 |
| 11437262 | Wafer de-chucking detection and arcing prevention | Ganesh Balasubramanian, Hemant P. Mungekar | 2022-09-06 |