Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12203828 | Method and system for detecting anomalies in a semiconductor processing system | Ryan T. DOWNEY, James L'HEUREUX, Andreas Neuber, Michael W. Johnson, Joseph A. VAN GOMPEL +5 more | 2025-01-21 |
| 12002702 | Wafer de-chucking detection and arcing prevention | Ganesh Balasubramanian, Byung Chul Yoon | 2024-06-04 |
| 11437262 | Wafer de-chucking detection and arcing prevention | Ganesh Balasubramanian, Byung Chul Yoon | 2022-09-06 |
| 11355325 | Methods and systems for monitoring input power for process control in semiconductor process systems | Ramesh Gopalan, Guomin Mao, Rongping Wang, Teryl Pratt | 2022-06-07 |
| 11024522 | Virtual sensor for spatially resolved wafer temperature control | Uwe Haller, Ganesh Balasubramanian | 2021-06-01 |
| 11004710 | Wafer placement error detection based on measuring a current through an electrostatic chuck and solution for intervention | Ganesh Balasubramanian | 2021-05-11 |
| 10777394 | Virtual sensor for chamber cleaning endpoint | William Michael Pryor, Zhijun Jiang | 2020-09-15 |
| 10636630 | Processing chamber and method with thermal control | Ganesh Balasubramanian, Yoichi Suzuki, Abdul Aziz Khaja | 2020-04-28 |
| 8168462 | Passivation process for solar cell fabrication | Peter G. Borden, Michael P. Stewart, Li Xu, Christopher S. Olsen | 2012-05-01 |
| 7867921 | Reduction of etch-rate drift in HDP processes | Anchuan Wang, Young S. Lee, Manoj Vellaikal, Jason Bloking, Jin-Ho Jeon | 2011-01-11 |
| 7799704 | Gas baffle and distributor for semiconductor processing chamber | Soonam Park, Farhan Ahmad, Sanjay Kamath, Young S. Lee, Siqing Lu | 2010-09-21 |
| 7745350 | Impurity control in HDP-CVD DEP/ETCH/DEP processes | Anchuan Wang, Young S. Lee, Manoj Vellaikal, Jason Bloking, Jin-Ho Jeon | 2010-06-29 |
| 7740706 | Gas baffle and distributor for semiconductor processing chamber | Soonam Park, Farhan Ahmad, Sanjay Kamath, Young S. Lee, Siqing Lu | 2010-06-22 |
| 7704897 | HDP-CVD SiON films for gap-fill | Young S. Lee, Agnieszka Jakubowicz, Zhong Qiang Hua, Rionard Purnawan, Sanjay Kamath +1 more | 2010-04-27 |
| 7678715 | Low wet etch rate silicon nitride film | Jing-Lung Wu, Young S. Lee, Anchuan Wang | 2010-03-16 |
| 7628897 | Reactive ion etching for semiconductor device feature topography modification | Anjana M. Patel, Manoj Vellaikal, Anchuan Wang, Bikram Kapoor | 2009-12-08 |
| 7498268 | Gas delivery system for semiconductor processing | Sudhir Gondhalekar, Padmanabhan Krishnaraj, Tom K. Cho, Muhammad M. Rasheed, Thanh Pham +1 more | 2009-03-03 |
| 7329586 | Gapfill using deposition-etch sequence | Manoj Vellaikal, Young S. Lee, Yasutoshi Okuno, Hiroshi Yuasa | 2008-02-12 |
| 7229931 | Oxygen plasma treatment for enhanced HDP-CVD gapfill | Young S. Lee, Manoj Vellaikal, Karen Greig, Bikram Kapoor | 2007-06-12 |
| 7141138 | Gas delivery system for semiconductor processing | Sudhir Gondhalekar, Padmanabhan Krishnaraj, Tom K. Cho, Muhammad M. Rasheed, Thanh Pham +1 more | 2006-11-28 |