Issued Patents All Time
Showing 25 most recent of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11373882 | Coated article and semiconductor chamber apparatus formed from yttrium oxide and zirconium oxide | Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Kenneth S. Collins | 2022-06-28 |
| 10847386 | Method of forming a bulk article and semiconductor chamber apparatus from yttrium oxide and zirconium oxide | Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Kenneth S. Collins | 2020-11-24 |
| 10840112 | Coated article and semiconductor chamber apparatus formed from yttrium oxide and zirconium oxide | Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Kenneth S. Collins | 2020-11-17 |
| 10840113 | Method of forming a coated article and semiconductor chamber apparatus from yttrium oxide and zirconium oxide | Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Kenneth S. Collins | 2020-11-17 |
| 10622194 | Bulk sintered solid solution ceramic which exhibits fracture toughness and halogen plasma resistance | Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Kenneth S. Collins | 2020-04-14 |
| 10242888 | Semiconductor processing apparatus with a ceramic-comprising surface which exhibits fracture toughness and halogen plasma resistance | Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Kenneth S. Collins | 2019-03-26 |
| 9051219 | Semiconductor processing apparatus comprising a solid solution ceramic formed from yttrium oxide, zirconium oxide, and aluminum oxide | Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Kenneth S. Collins | 2015-06-09 |
| 9012030 | Process chamber component having yttrium—aluminum coating | Nianci Han, Hong Shih | 2015-04-21 |
| 8758858 | Method of producing a plasma-resistant thermal oxide coating | Jennifer Y. Sun, Kenneth S. Collins, Thomas Graves, Ren-Guan Duan, Senh Thach | 2014-06-24 |
| 8623527 | Semiconductor processing apparatus comprising a coating formed from a solid solution of yttrium oxide and zirconium oxide | Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Kenneth S. Collins | 2014-01-07 |
| 8367924 | Buried insulator isolation for solar cell contacts | Peter G. Borden | 2013-02-05 |
| 8268728 | Method of cleaning and forming a negatively charged passivation layer over a doped region | Michael P. Stewart, Lisong Zhou, Jen Shu | 2012-09-18 |
| 8231736 | Wet clean process for recovery of anodized chamber parts | Jennifer Y. Sun, Senh Thach, Xi Zhu, Anisul Khan | 2012-07-31 |
| 8168462 | Passivation process for solar cell fabrication | Peter G. Borden, Michael P. Stewart, Hemant P. Mungekar, Christopher S. Olsen | 2012-05-01 |
| 8129029 | Erosion-resistant plasma chamber components comprising a metal base structure with an overlying thermal oxidation coating | Jennifer Y. Sun, Kenneth S. Collins, Thomas Graves, Ren-Guan Duan, Senh Thach | 2012-03-06 |
| 8114525 | Process chamber component having electroplated yttrium containing coating | Nianci Han, Hong Shih, Yang Zhang, Danny Lu, Jennifer Y. Sun | 2012-02-14 |
| 8110086 | Method of manufacturing a process chamber component having yttrium-aluminum coating | Nianci Han, Hong Shih | 2012-02-07 |
| 8067067 | Clean, dense yttrium oxide coating protecting semiconductor processing apparatus | Jennifer Y. Sun, Senh Thach, Jim Dempster | 2011-11-29 |
| 8034734 | Semiconductor processing apparatus which is formed from yttrium oxide and zirconium oxide to produce a solid solution ceramic apparatus | Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Kenneth S. Collins | 2011-10-11 |
| 8016948 | Method of removing contaminants from a coating surface comprising an oxide or fluoride of a group IIIB metal | Xikun Wang, Jennifer Y. Sun | 2011-09-13 |
| 8008208 | Method of cleaning and forming a negatively charged passivation layer over a doped region | Michael P. Stewart, Lisong Zhou, Jen Shu | 2011-08-30 |
| 7846264 | Cleaning method used in removing contaminants from a solid yttrium oxide-containing substrate | Xikun Wang, Jennifer Y. Sun | 2010-12-07 |
| 7833401 | Electroplating an yttrium-containing coating on a chamber component | Nianci Han, Hong Shih, Yang Zhang, Danny Lu, Jennifer Y. Sun | 2010-11-16 |
| 7820472 | Method of forming front contacts to a silicon solar cell without patterning | Peter G. Borden, John O. Dukovic | 2010-10-26 |
| 7718029 | Self-passivating plasma resistant material for joining chamber components | Jennifer Y. Sun, Senh Thach, Kelly A. McDonough, Robert Scott Clark | 2010-05-18 |